Corrosion reliability of microelectronic devices. Pt. 2, Models and experimental results

• Autorzy: Trzaska Z.

Warianty tytułu

PL

Odporność korozyjna urządzeń mikroelektronicznych. Cz. 2, Modele i eksperymenty

• Języki publikacji: EN

Abstrakty

EN

The first part of the paper, which has appeared in the March 2010 issue [43] covered a survey of fundamentals concerning susceptibility of current copper-based printed and integrated circuit boards and their limitations. It also introduced the failure rate of microelectronic systems caused by corrosion of their elements. In this Part II we will feature the modeling procedures of electrochemical corrosion of microelectronic materials and reliability diagnostic of manufactured products. Therefore, the possibility of applying the electrochemical impedance spectroscopy is presented. Results of performed experiments are also demonstrated. They attested that the corrosion is one of the most critical degrading mechanisms that pose direct threat to the structural integrity of microelectronic products and integrated devices.

PL

Część 2 artykułu poświęcona jest odporności korozyjnej elementów i urządzeń mikroelektronicznych. Podana została miara w postaci stopnia uszkodzeń mikroelektronicznych układów powodowanych przez korozję ich elementów. Korozja stanowi jeden z najbardziej krytycznych mechanizmów degradacji, które stanowią bezpośrednie zagrożenie co do integralności mikroelektronicznych wyrobów oraz elementów scalonych. Ich czas poprawnego działania jest ograniczany głównie przez destrukcję dokładności wymiarów elementów odgrywających istotny czynnik konstrukcyjny i układowy. Dzieje się tak dlatego, że połączenia między różnymi elementami i częściami składowymi muszą być stale takie same, jak zostały zaprojektowane odpowiednio do środowiska, w którym urządzenie działa. Ponadto, sprawą najważniejszą jest dostępność mało stratnych, mało kosztownych a także łatwo wytwarzanych elementów, które mogą wytrzymać podwyższone temperatury stosowane podczas ich laminowania oraz procesu oczyszczania a zarazem nie mogą być przyczyną ich degradacji z upływem czasu.

Słowa kluczowe

EN

electrochemical corrosion; impedance spectroscopy; electric circuit models; scaning microscopy

PL

korozja elektrochemiczna; równoważne modele; spetroskopia impedancyjna; mikroskopia skaningowa

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Elektronika : konstrukcje, technologie, zastosowania
• Rocznik: 2010
• Tom: Vol. 51, nr 4
• Strony: 11--18
• Opis fizyczny: Bibliogr. 44 poz., wykr.

Twórcy

autor

Trzaska Z.

• Warsaw University of Technology, Institute of the Theory of Electrical Engineering and Informatic-Measurement Systems.

Bibliografia

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