TiO₂/SiO₂ multilayer as an antireflective and protective coating deposited by microwave assisted magnetron sputtering

• Autorzy: Mazur M. , Wojcieszak D. , Domaradzki J. , Kaczmarek D. , Song S. , Placido F.
• Języki publikacji: EN

Abstrakty

EN

In this paper designing, preparation and characterization of multifunctional coatings based on TiO₂/SiO₂ has been described. TiO₂ was used as a high index material, whereas SiO₂ was used as a low index material. Multilayers were deposited on microscope slide substrates by microwave assisted reactive magnetron sputtering process. Multilayer design was optimized for residual reflection of about 3% in visible spectrum (450-800 nm). As a top layer, TiO₂ with a fixed thickness of 10 nm as a protective film was deposited. Based on transmittance and reflectance spectra, refractive indexes of TiO₂ and SiO₂ single layers were calculated. Ultra high vacuum atomic force microscope was used to characterize the surface properties of TiO₂/SiO₂ multilayer. Surface morphology revealed densely packed structure with grains of about 30 nm in size. Prepared samples were also investigated by nanoindentation to evaluate their protective performance against external hazards. Therefore, the hardness of the thin films was measured and it was equal to 9.34 GPa. Additionally, contact angle of prepared coatings has been measured to assess the wetting properties of the multilayer surface.

Słowa kluczowe

EN

TiO2; optical coating; hardness; wettability; magnetron sputtering

• Wydawca: Stowarzyszenie Elektryków Polskich ; Polska Akademia Nauk ; Wojskowa Akademia Techniczna im. Jarosława Dąbrowskiego
• Czasopismo: Opto-Electronics Review
• Rocznik: 2013
• Tom: Vol. 21, No. 2
• Strony: 233--238
• Opis fizyczny: Bibliogr. 21 poz., rys., il., wykr.

Twórcy

autor

Mazur M.

autor

Wojcieszak D.

autor

Domaradzki J.

autor

Kaczmarek D.

autor

Song S.

autor

Placido F.

• Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, 11/17 Janiszewskiego, 50-372, Wrocław, Poland,

Bibliografia

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