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Electrical properties of HgCdTe films grown by MOCVD and doped with as

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Electrical properties of HgCdTe films grown by metal-organic chemical vapour deposition (MOCVD) on GaAs substrates and doped with the As acceptor during the growth were studied. Discrete mobility spectrum analysis was used to extract the parameters of the as-grown films and films after ion milling and during prolonged relaxation of milling-induced defects. The measurements revealed significant compensation of the as-grown MOCVD HgCdTe with As on Te sites being the main defect, residual donor concentration of the order of (2-5)x10¹⁵ cm⁻³ and the presence of some unidentified defects.
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Bibliografia
  • 1. C. D. Maxey, „Metal-Organic Vapor Phase Epitaxy (MOVPE) growth”, in Mercury Cadmium Telluride: Growth, Properties and Applications, pp. 113-129, edited by P. Capper and J. W. Garland, Wiley series in materials for electronic and optoelectronic applications, edited by S. Kasap, P. Capper and A. Willoughby, John Wiley & Sons, Chichester, 2011.
  • 2. P. Capper, „Narrow-bandgap II-VI semiconductors: growth”, in Springer Handbook of Electronic and Photonic Materials, part B: Growth and Characterization, pp. 303-324, edited by S. Kasap and P. Capper, Springer-Verlag, New York, 2007.
  • 3. M. Kinch, „HgCdTe: recent trends in the ultimate IR semiconductor”, J. Electron. Mater. 39, 1043-1052 (2010).
  • 4. P. Madejczyk, A. Piotrowski, K. Kłos, W. Gawron, J. Rutkowski, and A. Rogalski, „Control of acceptor doping in MOCVD HgCdTe epilayers”, Opto-Electron. Rev. 18, 271-276 (2010).
  • 5. P. Madejczyk, W. Gawron, A. Piotrowski, K. Kłos, J. Rutkowski, and A. Rogalski, „Improvement in performance of high-operating temperature HgCdTe photodiodes”, Infr. Phys. Technol. 54, 310-315 (2011).
  • 6. P. Madejczyk, A. Piotrowski, W. Gawron, K. Kłos, J. Pawluczyk, J. Rutkowski, J. Piotrowski, and A. Rogalski, „Growth and properties of MOCVD HgCdTe epilayers on GaAs substrates”, Opto-Electron. Rev. 13, 239-251 (2005).
  • 7. C. D. Maxey, J. C. Fitzmaurice, H. W. Lau, L. G. Hipwood, C. S. Shaw, C. L. Jones, and P. Capper, „Current status of large-area MOVPE growth of HgCdTe device heterostructures for infrared focal plane arrays”, J. Electron. Mater. 35, 1275-1282 (2006).
  • 8. P. Mitra, F. C. Case, M. B. Reine, R. Starr, and M. H. Weiler, „Doping in MOVPE of HgCdTe: orientation effects and growth of high performance IR photodiodes”, J. Cryst. Growth 170, 542-548 (1997).
  • 9. I. M. Baker and C. D. Maxey, „Summary of HgCdTe 2D technology in the U.K.”, J. Electron. Mater. 30, 682-689 (2000).
  • 10. I. I. Izhnin, I. A. Denisov, N. A. Smirnova, M. Pociask, and K. D. Mynbaev, „Ion-milling assisted study of defect structure of HgCdTe films grown by liquid phase epitaxy”, Opto-Electron. Rev. 18, 328-331 (2010).
  • 11. M. Pociask, I. I. Izhnin, E. S. Ilyina, S. A. Dvoretsky, N. N. Mikhailov, Yu. G. Sidorov, V. S. Varavin, and K. D. Mynbaev, „Study of the defect structure of Hg1-xCdx Te films by ion milling”, Acta Phys. Polon. 114, 1191-1199 (2008).
  • 12. J. Antoszewski, G. A. Umana-Membreno, and L. Faraone, „High-resolution mobility spectrum analysis of multicarrier transport in advanced infrared materials”, J. Electron. Mater. 41, 2816-2823 (2012).
  • 13. W. A. Beck and J. R. Anderson, „Determination of electrical transport properties using a novel magnetic field dependent Hall technique”, J. Appl. Phys. 62, 541-554 (1987).
  • 14. M. Carmody, D. Edwall, J. Ellsworth, J. Arias, M. Groenert, R. Jacobs, L. A. Almeida, J. H. Dinan, Y. Chen, G. Brill, and N. K. Dhar, „Role of dislocation scattering on the electron mobility of n-type long wave length infrared HgCdTe on silicon”, J. Electron. Mater. 36, 1098-1105 (2007).
  • 15. I. I. Izhnin, K. D. Mynbaev, M. Pociask, R. Ya. Mudryy, A. V. Voitsekhovskii, and N. Kh. Talipov, „Long-term room-temperature relaxation of the defects induced in (HgCd)Te by low-energy ions”, Physica B 404, 5025-5027 (2009).
  • 16. V. V. Bogoboyashchyy, I. I. Izhnin, K. D. Mynbaev, M. Pociask, and A. P. Vlasov, „Relaxation of electrical properties of n-type layers formed by ion milling in epitaxial HgCdTe doped with V-group acceptors”, Semicond. Sci. Technol. 21, 1144-1149 (2006).
  • 17. E. Belas, R. Grill, J. Franc, P. Moravec, R. Varghová, P. Höschl, and H. Sitter, „Dynamics of native point defects in H2 and Ar plasma-etched narrow gap (HgCd)Te”, J. Cryst. Growth 224, 52-58 (2001).
  • 18. E. Belas, V.V. Bogoboyashchii, R. Grill, I. I. Izhnin, A. P. Vlasov, and V. A. Yudenkov, „Time relaxation of points defects in p- and n-(HgCd)Te after ion beam milling”, J. Electron. Mater. 32, 698-702 (2003).
  • 19. I. I. Izhnin, A. I. Izhnin, H. V. Savytskyy, M. M. Vakiv, Y. M. Stakhira, O. E. Fitsych, M. V. Yakushev, A. V. Sorochkin, I. V. Sabinina, S. A. Dvoretsky, Yu. G. Sidorov, V. S. Varavin, M. Pociask-Bialy, and K. D. Mynbaev, „Defect structure of HgCdTe films grown by molecular beam epitaxy on Si substrates”, Semicond. Sci. Technol. 27, 035001 (2012).
  • 20. I. I. Izhnin, S. A. Dvoretsky, K. D. Mynbaev, N. N. Mikhailov, Yu. G. Sidorov, V. S. Varavin, R. Jakiela, M. Pociask, and G. Savitsky, „Arsenic incorporation in MBE-grown HgCdTe studied with the use of ion milling”, Phys. Stat. Sol. C7, 1618-1621 (2010).
  • 21. I. Izhnin, V. Bogoboyashchyy, A. Kotkov, A. Moiseev, and N. Grishnova, „Type conductivity conversion in MOCVD Cdx Hg1-xTe/GaAs hetero-structures under ion milling”, Proc. SPIE 5957, 595716 (2005).
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWAD-0033-0018
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