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Sub-THz radiation room temperature sensitivity of long-channel silicon field effect transistors

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Room temperature operating n-MOSFETs (n-type metal-oxide silicon field effect transistors) used for registration of sub-THz (sub-terahertz) radiation in the frequency range v = 53-145 GHz are considered. n-MOSFETs were manufactured by 1-µm Si CMOS technology applied to epitaxial Si-layers (d ≈15 µm) deposited on thick Si substrates (d = 640 µm). It was shown that for transistors with the channel width to length ratio W/L = 20/3 µm without any special antennas used for radiation input, the noise equivalent power (NEP) for radiation frequency v ≈76 GHz can reach NEP ∼6x10⁻¹⁰ W/Hz¹/². With estimated frequency dependent antenna effective area Sest for contact wires considered as antennas, the estimated possible noise equivalent power NEPpos for n-MOSFET structures themselves can be from ∼15 to ∼10³ times better in the specral range of v ∼55-78 GHz reaching NEPpos ≈10⁻¹² W/Hz¹/².
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194--199
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Bibliogr. 18 poz., il., rys., wykr.
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Bibliografia
  • [1] F. Sizov: THz radiation sensors. Opto-Electron. Rev. 18, 10-36 (2010).
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  • [4] W. Knap, F. Teppe, Y. Meziani, N. Dyakonova, J. Lusakowski, F. Boeuf, T. Skotnicki, D. Maude, S. Rumyantsev, and M. S. Shur: Plasma wave detection of sub-terahertz and terahertz radiation by silicon field-effect transistors. Appl. Phys. Lett. 85, 675-677 (2004).
  • [5] R. Tauk, F. Teppe, S. Boubanga, D. Coquillat, W. Knap, Y. Meziani, C. Gallon, F. Boeuf, T. Skotnicki, C. Fenouillet-Beranger, D. K. Maude, S. Rumyantsev, and M. S. Shur: Plasma wave detection of terahertz radiation by silicon field effect transistors: responsivity and noise equivalent power. Appl. Phys. Lett. 89, 253511 (2006).
  • [6] E. Öjefors, U. R. Pfeiffer, A. Lisauskas, and H. G. Roskos: A 0.65 THz focal-plane array in a quarter-micron CMOS process technology. IEEE J. Solid-St. Circuits 44, 1968-1976 (2009).
  • [7] F. Schuster, D. Coquillat, H. Videlier, M. Sakowicz, F. Teppe, L. Dussopt, B. Giffard, T. Skotnicki, and W. Knap: Broadband terahertz imaging with highly sensitive silicon CMOS detectors. Opt. Express 19, 7827-7832 (2011).
  • [8] E. Öjefors, N. Baktash, Y. Zhao, R. Al Hadi, H. Sherry, and U. Pfeiffer: Terahertz imaging detectors in a 65-nm CMOS SOI technology. Proc. the 37th European Conf. Solid-St. Circuits, Seville, 486-489 (2010).
  • [9] S. L. Rumyantsev, K. Fobelets, D. Veksler, T. Hackbarth, and M. Shur: Strained-Si modulation doped field effect transistors as detectors of terahertz and sub-terahertz radiation. Semicond. Sci. Technol. 23, 105001 (2008).
  • [10] W. Knap, M. Dyakonov, D. Coquillat, F. Teppe, N. Dyakonova, J. Lusakowski, K. Karpierz, M. Sakowicz, G. Valusis, D. Seliuta, I. Kasalynas, A. El Fatimy, Y.M. Meziani, and T. Otsuji: Field effect transistors for terahertz detection: Physics and First Imaging Applications. J. Infrared Milli. Terahz. Waves 30, 1319-1337 (2009).
  • [11] A. Lisauskas, D. Glaab, H.G. Roskos, E.U. Oejefors, and R. Pfeiffer: Terahertz imaging with Si MOSFET focal-plane arrays. Proc. SPIE 7215, 72150J-11 (2009).
  • [12] A. Lisauskas, U. Pfeiffer, E. Öjefors, P.H. Bolivar, D. Glaab, and H.G. Roskos: Rational design of high-responsivity detectors of terahertz radiation based on distributed self-mixing in silicon field-effect transistors. J. Appl. Phys. 105, 114511 (2009).
  • [13] M. Sakowicz, M. B. Lifshits, O. A. Klimenko, F. Schuster, D. Coquillat, F. Teppe, and W. Knap: Terahertz responsivity of field effect transistors versus their static channel conductivity and loading effects. J. Appl. Phys. 110, 054512 (2011).
  • [14] C. A. Balanis, Antenna Theory: Analysis and Design, Wiley, New Jersey, 2005.
  • [15] Antenna Engineering Handbook, edited by J. L. Volakis, McGraw-Hill, New York 2007.
  • [16] F. Sizov, V. Reva, A. Golenkov, and V. Zabudsky: Un-cooled detectors challenges for THz/sub-THz arrays imaging. J. Infrared Milli. Terahz. Waves, 32, 1192-1206 (2011).
  • [17] M. Sakowicz, J. Lusakowski, K. Karpierz, M. Grynberg, W. Knap, and W. Gwarek: Polarization sensitive detection of 100 GHz radiation by high mobility field-effect transistors. J. Appl. Phys. 104, 024519 (2008).
  • [18] Y. Deng and M.S. Shur: Electron mobility and terahertz detection using silicon MOSFETs. Solid-St. Electr. 47, 1559-1563 (2003).
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWAD-0027-0012
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