Numerical analysis of absorption and transmission photoacoustic spectra of silicon samples with differently treated surfaces

• Autorzy: Maliński M. , Chrobak Ł.
• Języki publikacji: EN

Abstrakty

EN

This paper presents results of the photoacoustic (PA) spectral studies, of a series of silicon samples with differently prepared surfaces, in two PA experimental configurations, so-called, absorption and transmission ones. The PA amplitude spectra of the samples indicated existence of the damaged surface layers. In the paper, the two layer mathematical models of a sample with a damaged surface layer that were used for numerical interpretation of the amplitude PA spectra of the investigated samples, are presented and discussed.

Słowa kluczowe

EN

semiconductors; silicon; photoacoustic spectroscopy; surface layer; surface quality; non-destructive testing

• Wydawca: Stowarzyszenie Elektryków Polskich ; Polska Akademia Nauk ; Wojskowa Akademia Techniczna im. Jarosława Dąbrowskiego
• Czasopismo: Opto-Electronics Review
• Rocznik: 2011
• Tom: Vol. 19, No. 1
• Strony: 46--50
• Opis fizyczny: Bibliogr. 15 poz., il., wykr.

Twórcy

autor

Maliński M.

autor

Chrobak Ł.

• Department of Electronics and Computer Science, Technical University of Koszalin, 2 Śniadeckich Str., 75-453 Koszalin, Poland,

Bibliografia

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