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In this work we discuss the influence of the atomic force microscopy (AFM) probe tip geometry and the object - quantum dot form on the quantum dots dimension in the growth plane reconstructed from the AFM measurements. It is shown that ignoring the geometry of the probe tip and the quantum dot leads to significant differences between dimensions obtained from the AFM measurements and the real dimensions. Inaccuracies in QD size determination of the nano-objects from AFM measurements are defined.
Słowa kluczowe
Wydawca
Czasopismo
Rocznik
Tom
Strony
252--254
Opis fizyczny
Bibliogr. 11, wykr.
Twórcy
autor
autor
- Institute of Electron Technology, 32/46 Lotników Ave., 02-668 Warsaw, Poland, piotrows@ite.waw.pl
Bibliografia
- [1] J. P. McCaffrey, M. D. Robertson, S. Fafard, Z. R. Wasilewski, E. M. Griswold, and L. D. Madsen: Determination of the size, shape, and composition of indium-flushed self-assembled quantum dots by transmission electron microscopy. J. Appl. Phys. 88, 2272-2277, 2000.
- [2] M. C. Xu, Y. Temko, T. Suzuki, and K. Jacobi: Shape transition of InAs quantum dots on GaAs(001). J. Appl. Phys. 98, 083525-1-8, 2005.
- [3] T. Suzuki, Y. Temko, and K. Jacobi: Shape of InAs quantum dots grown on the GaAs (113) B surface. Appl. Phys. Lett. 80, 4744-4746, 2002.
- [4] H. Z. Song, Y. Nakata, Y. Okada, T. Miyazawa, T. Ohshima, M. Takatsu, M. Kawabe, and N. Yokoyama: Growth process of quantum dots precisely controlled by an AFM - assisted technique. Physica E21, 625-630, 2004.
- [5] T. Piotrowski and M. Kaczmarczyk: Statistical methods of determining the QD dimensions based on atomic force microscopy measurements. J. Mater Sci.-Mater. El. 19, S347-S350, 2008.
- [6] D. Keller: Reconstruction of STM and AFM images distorted by finite-size tips. Surf. Sci. 253, 353-364, 1991.
- [7] K. Shiramine, S. Muto, T. Shibayama, N. Sakaguchi, H. Ichinose, T. Kozaki, S. Sato, Y. Nakata, N. Yokoyama, and M. Taniwaki: Tip artifact in atomic force microscopy observations of InAs quantum dots grown in Stranski-Krastanow mode. J. Appl. Phys. 101, 033527, 2007.
- [8] D. Ricci and P. C. Braga: Recognizing and avoiding artifacts in AFM imaging. Atomic Force Microscopy: Biomedical Methods and Applications, Vol. 242, pp. 25-37, Springer, 2003.
- [9] Y. Sun and J. H. L. Pang: AFM image reconstruction for deformation measurements by digital image correlation. Nanotechnology 17, 933, 2006.
- [10] T. Machleidt, R. Kastner, and K. H. Franke: Reconstruction and geometric assessment of AFM tips. Nanoscale Calibration Standards and Methods, pp. 295-310, Wiley-VCH, 2006.
- [11] G. Dahlen, M. Osborn, H. Ch. Liu, R. Jain, W. Foreman, and J. R. Osborne: Critical dimension AFM tip characterization and image reconstruction applied to the 45-nm node. Proc. SPIE 6152, 61522R, 2006.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWAD-0016-0053