Silicon 9 MHz MEMS Based Oscillator with Low Phase Noise and High Quality Factor

• Autorzy: Lo Conte F. , Grogg F. D. , Ionescu A. M. , Kayal M.
• Języki publikacji: EN

Abstrakty

EN

A 9.4MHz micro-electromechanical oscillator based on a Vibrating Body Field Effect Transistor (VB-FET) is presented in this work. The electrical characteristics of this active MEM resonator are detailed for static and dynamic operation. In open-loop configuration the tuning fork resonator provide a quality factor of 9400. The benefit of the intrinsic gain for oscillator design is analyzed and an oscillator design is proposed based on these findings. The proposed oscillator is fully CMOS compatible. The achieved performance shows the advantages of an active MEM resonator for the construction of MEM based oscillators

Słowa kluczowe

EN

active MEMS; resonator; tunable oscillator; tuning fork; phase noise

PL

MEMS; rezonator; oscylator przestrajalny; generator kamertonowy; szum fazowy

• Wydawca: Polish Academy of Sciences, Committee of Electronics and Telecommunication
• Czasopismo: Electronics and Telecommunications Quarterly
• Rocznik: 2009
• Tom: Vol. 55, No 4
• Strony: 625--637
• Opis fizyczny: Bibliogr. 17 poz., wykr.

Twórcy

autor

Lo Conte F.

autor

Grogg F. D.

autor

Ionescu A. M.

autor

Kayal M.

• Electronic Laboratory, EPFL, 1015 Lausanne, Switzerland,

Bibliografia

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