Rozwój mikrosystemów, czujników pomiarowych i systemów pomiarowych w Instytucie Systemów Elektronicznych PW

• Autorzy: Jachowicz R.

Warianty tytułu

EN

The development of microsystems, measuring - sensors and measuring-systems in the Institute of Electronic Systems PW

• Języki publikacji: PL

Abstrakty

PL

Rozwój czujników, czujników półprzewodnikowych a następnie mikrosystemów następował nieprzerwanie od lat 70 ubiegłego wieku. Postęp w dziedzinie mikroczujników i mikrosystemów przyczynił się również do znacznego postępu w rozwoju komputerowych systemów pomiarowych, dla których te pierwsze były źródłami informacji on-line. W Instytucie Systemów Elektronicznych (ISE) Politechniki Warszawskiej (PW) rozwój ten następował również, chociaż jego skala i tempo była znacznie mniejsza niż w krajach o wysokim poziomie technologii. Artykuł przedstawia krótką informację nt. ewolucyjnych zmian zakresu prac badawczych w omawianej tematyce w Zakładzie Mikrosystemów i Systemów Pomiarowych ISE PW.

EN

The fast development of sensors, semiconductor sensors and microsystems has been noticed since beginning of 70 of last century. That process had also contribution to very intensive progress in computer based measurement systems because sensors and microsystems were on-line Information sources. These two types of development took place also in the Institute of Electronic Systems, Warsaw University of Technology although with smaller scale and with some time delay than In other countries of high technology. A short review of evolution changes of scientific topics in Microsystems and Measurement Systems Division, ISE PW are discussed in the paper.

Słowa kluczowe

PL

mikroczujniki; mikrosystemy; komputerowe systemy pomiarowe

EN

microsensors; microsystems; computer based measurement systems

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Elektronika : konstrukcje, technologie, zastosowania
• Rocznik: 2009
• Tom: Vol. 50, nr 8
• Strony: 149--152
• Opis fizyczny: Bibliogr. 62 poz.

Twórcy

autor

Jachowicz R.

• Politechnika Warszawska, Instytut Systemów Elektronicznych

Bibliografia

• [1] Hejn K., Pacut A.: Improved Definition of ADC Effective Resolution. Computer Standards & Interfaces, 2001, z. 23(2001). pp. 137-147.
• [2] Hejn K., Jędrachowicz J., Leśniewski A.: A Correct Method for Effective Resolution Evaluation (w: Measurement), vol. 31, 2002, pp. 253-260.
• [3] Hejn K., Pacut A.: Effective resolution of analog to digital converters. Evolution of accuracy (w: IEEE Instrumentation & Measurement Magazine), 2003, September 2003, pp. 48-55.
• [4] Hejn K., Pacut A.: Sine-Wave Parameters Estimation The Second Source of Inaccuracy (w: Proceedings of the 20th IEEE Instrumentation and Measurement Technology Conference), 2003, z. II, pp. 1328-1333.
• [5] Pacut A., Hejn K.: Reference properties of uniform quantizers - comparison of Widrow's and direct approaches (w: Computer Standards & Interfaces), 2003, z. 25, pp. 3-13.
• [6] Hejn K., Jędrachowicz J., Leśniewski A.: Oversampling Delta-sigma Converter Implementation in FPAA and FPGA (w: Proceedings of IFAC Workshop on Programmable Devices and Systems PDS 2004, wyd. IFAC), 2004, pp. 257-262.
• [7] Koprek W., Hejn K.: A Flexible Electronic Tool for VXI Register-based Device Development (w: Proceedings of SPIE: Photonics Applications in Astronomy, Communications, Research and High Energy Physics Experiments), 2005, z. 5948, cz. IV, pp. 81-90.
• [8] Koprek W.: A Flexible Electronic Tool for Development of VXI Message-based Devices. Praca doktorska pod kierunkiem prof. Konrada Hejna. Warszawa 2008.
• [9] Pankanin G. L.: The Vortex Flowmeter: Various Methods of Investigating Phenomena - Measurement Science and Technology 16 No 3, (2005), R1-R16 (Review article).
• [10] Pankanin G. L., Berliński J., Chmielewski R.: Analytical Modelling of Karman Vortex Street - Metrology & Measurement Systems, vol. XII, no 4 (2005), pp. 411-425.
• [11] Pankanin G. L., Berliński J., Chmielewski R.: Simulation of Karman Vortex Street Development using new model - Metrology & Measurement Systems, vol. XIII, no 1 (2006), pp. 35-47.
• [12] Pankanin G. L., Berliński J., Chmielewski R.: Simulation of Vortex Street Development using Model with Modifications - Metrology & Measurement Systems, vol. XIII, no 4 (2006), pp. 395-40.
• [13] Pankanin G., Kulińczak A., Berliński J.: Investigations of Karman Vortex Street using Flow Visualization and Image Processing. Sensors and Actuators A: Physical 138 (2007), pp. 366-375.
• [14] Berliński J., Chmielewski R., Pankanin G. L.: Vortex Flow Field Investigations with Application of Hot-Wire Anemometer - Proc. of International Conference of Flow Measurement FLOMEKO 2000, Salvador 2000, Brazil, CD-Rom proceedings.
• [15] Pankanin G. L., Berliński J., Chmielewski R.: Karman Vortex Street Visualization - Proc. of International Symposium on Flow Visualization, Edinburgh 2000, UK, paper No 239, CD-Rom proceedings.
• [16] Pankanin G., Kulińczak A., Berliński J.: Karman vortex street parametrization with image processing application - Proceedings of SPIE Optoelectronic and Electronic Sensors V, 2003, vol. 5124, pp. 186-192.
• [17] Pankanin G. L., Berliński J., Chmielewski R.: Numerical Modelling of Vortices Development in Tapered Duet - Proc. of the International Symposium on Flow Measurement FLOMEKO XI, Groningen 2003, The Netherlands, CD-ROM proceedings.
• [18] Pankanin G., Kulińczak A., Berliński J.: Image Processing in Karman Vortex Street Identification - Proc. of the 7th Triennal International Symposium on Fluid Control, Measurement and Visualization FLUCOME 2003, Sorrento 2003, Italy, CD-ROM proceedings.
• [19] Pankanin G. L., Berliński J., Chmielewski R.: Spectral Analysis Application in Hot-Wire Anemometer Investigations of Phenomena Appearing in Vortex Flow Meter - Proc. of XVIII IMEKO Congress, Rio de Janeiro 2006, Brazil, CD-ROM proceedings.
• [20] Pankanin G. L.: Experimental and Theoretical Investigations Concerning the Influence of Stagnation Region on Karman Vortex Shedding - Proc. IMTC 2007, IEEE Instrumentation and Measurement Technology Conference, Warsaw 2007, Poland, CD-ROM proceedings.
• [21] Jachowicz R., Janyszek B., Pijanowska D., Jaźwiński J.: Back-side contacts for sensor structure packaging. Mat. Konf., SPIE Conference on Micromachining and Microfabrication, Paryż, Francja, 30.03-1.04, 1999.
• [22] Jachowicz R.: Moisture Content Measurement in Solids - Limitation and Improvements with Modern Technology. Proc. Third Workshop on Electromagnetic Wave Interaction with Water and Moist Substances, Athens, GA, USA, 11-13 kwietnia, 1999 (referat zaproszony na otwarcie konferencji), pp. 32-41.
• [23] Jachowicz R., Pancewicz T., Gniazdowski Z., Ażgin Z., Kowalski P.: The Empirical Verification of the FEM Model of Semiconductor Pressure Sensor. Sensors & Actuators Part A - Physical Elsevier Seq., 1999, vol. 76, 1-3, pp. 260-265.
• [24] Weremczuk J., Jachowicz R.: Evaluation of Thin Film Water Behaviour in Silicon Dew-Point Sensor. Mat. Konf., The 13th European Conference on Solid-State Transducers EUROSENSORS XIII, Haga, Holandia, 12-15 września, 1999, pp. 355-358.
• [25] Jachowicz R., Wójtowicz G., Weremczuk J.: Non-Contact Electromagnetic Transmitter To Any Capacitive Sensor. Mat. Konf. The 13th European Conference on Solid-State Transducers EUROSENSORS XIII, Haga, Holandia, 12-15 września, 1999, 561-564.
• [26] Jachowicz R., Wójtowicz G., Weremczuk J.: A Non-Contact Passive Electromagnetic Transmitter To Any Capacitive Sensor-Design, Theory and Model Tests. Sensors & Actuators, 2000, vol. 85, pp. 402-408.
• [27] Jachowicz R., Weremczuk J.: Sub-cooled Water Detection in Silicon Dew-Point Hygrometer. Sensors & Actuators, vol. 85, 2000, 75-83.
• [28] Weremczuk J., Gniazdowski Z., Łysko J.: Temperature Distribution on Semiconductor Dew Point Hygrometer Mirrors. Mat. Konf., The 14th European Conference on Solid-State Transducers EUROSENSORS XIV, Kopenhaga, Dania, 27-30 sierpnia, 2000, pp. 723-726.
• [29] Weremczuk J., Jachowicz R., Gniazdowski Z., Łysko J.: Optimization of semiconductor dew point hygrometer mirrors surface temperature homogeneity. Sensors & Actuators A 92, 2001, pp. 10-15.
• [30] Jachowicz R., Ażgin Z.: FET Pressure Sensor and Iterative Method for Modelling of The Device. Transducers'01/Eurosensors XV, Monachium, Niemcy, 10-14 czerwca, 2001, pp. 308-311.
• [31] Jachowicz R., Weremczuk J., Sochoń J.: The Water Pollution Monitoring Sensor Matrix - Automatic stand for sensor Evaluation. Proc. of The International Workshop on New Developments on Sensors for Enviromental Control, S.Cesarea Terme, Włochy, 27-29 maja 2002 r., pp. 64-69.
• [32] Weremczuk J., Wawrzyniak Z., Jachowicz R.: Morphology Based Subcooled Water Detection in Dew Point Hygrometer. Proceedings of EUROSENSORS XVI Conference, Praga, Rep.Czech, 15-18 września 2002 r, pp. 1267-1270.
• [33] Weremczuk J., Jachowicz R.: New Methods of Supercooled water Detection in Dew Point Hygrometers. Proc. of The 4th International Symposium on Humidity and Moisture, Taipei, Taiwan, 16-19 września 2002 r., pp. 405-412.
• [34] Weremczuk J., Wawrzyniak Z., Jachowicz R.: A New Method of Super-cooled Water Recognition in Dew Point Hygrometer by Morphology Based Image Processing. Sensors & Actuators A, Elsevier B. V., 2004, pp. 240-244.
• [35] Brzozka Z., Cabestany J., Filipkowski A., Jachowicz R. S., Moscetta P., Sanfilippo L., Weremczuk J., Wroblewski W.: An Innovative Automated flow Measuring Probe for The Measurement of Chemical Parameters in Water Based on CHEMFET Sensors. AutMoNet Conf., Vienna, Austria, April 19-20, 2004, pp. 283-288.
• [36] Jachowicz R., Weremczuk J., Paczesny D., Rapiejko P.: Fast Dew Point Hygrometer for Laryngoloy Applications. IEEE Sensors'2004, Vienna, Austria, Oct. 24-27, 2004, p. 299.
• [37] Jachowicz R., Weremczuk J., Tarapata G.: Fast Dew Point Hygrometer for Measurements of Human Skin Evaporation factor. EUROSENSORS XVIII Conf. On solid state Transducers, Roma, Italy, Sept.13-15, 2004, pp. 60-63.
• [38] Weremczuk J.,Chudy M., Dybko A., Beck R., Brzózka Z., Jachowicz R.: Array of Planar Capacitive Sensors as a Media Detector for Microfluidic System. uTAS Conf., Malmo, Sweden, Sept. 26-30, 2004, pp. 494-496.
• [39] Jachowicz R..Weremczuk J., Sochon J., Tarapata G.: Kompleksowe komputerowe stanowisko pomiarowe do oceny parametrów czujników typu IS-FET. Kongres Metrologii, Wrocław, 6-9 września, 2004, pp. 367-370.
• [40] Fabianowski W., Jachowicz R., Karpińska A., Ażgin Z.: Integrated Circuits Protection with the Langmuir-Blodgett films. Bioelectro-chemistry, No. 66, Elsevier, 2005, pp. 49-53.
• [41] Jachowicz R., Weremczuk J., Tarapata G.: Transepidermal Water Loss Sensor Based on Fast Dew Point Hygrometer. Sensors & Actuators A, 2005, vol. 123-124, pp. 7-11
• [42] Paczesny D., Weremczuk J., Jachowicz R., Rapiejko P.: Construction of Fast Dew Point Hygrometer With Integrated Semiconductor Detector for Medical Applications. PRIME 2005 Conference, July 25-28, 2005, Lausanne, Switzerland, pp. 347-350.
• [43] Weremczuk J., Tarapata G., Paczesny D., Jachowicz R.: Dynamic properties optimization of silicon fast dew point hygrometer. EUROSENSORS XIX, Barcelona, Hiszpania, Sept. 11-14, 2005.
• [44] Jachowicz R.: Mini- and Microsystems in Micro- and Nanotechnology. Proc. XIV Intern. Electrotechnical and Computer Science Conf. ERK 2005, pp21-26, Portoroż, Slovenija, Sept. 26-28, 2005 (referat zaproszony na otwarcie konferencji).
• [45] Jachowicz R., Weremczuk J., Paczesny D., Rapiejko P., Jurkiewicz D.: Sensors system and operation algorithm for humidity and temperature measurements inside human nose and human throat. Proc. 4th IEEE International Conference on Sensors, Irvine, California, Oct. 31-Nov. 1, 2005.
• [46] Jachowicz R., Weremczuk J., Tarapata G., Paczesny D.: Super Fast Dew Point Hygrometer. Proc. 5th International Symposium on Humidity and Moisture - ISHM 2006, Rio de Janeiro, Brazil, May 02-05, 2006.
• [47] Mundlein M., Valentin B., Chabicovsky R., Nicolics J., Weremczuk J., Tarapata G., Jachowicz R.: Transepidermal Water Loss (TEWL) Measurements with Two Novel Sensors Based on Different Sensing Principles. EUROSENSORS XX, 17-20 Sept. 2006, Göteborg, Sweden, CD T1A-P4.
• [48] Weremczuk J., Tarapata G., Paczesny D., Jachowicz R.: Fast Dew Point Hygrometer with Silicon Integrated Detector - Optimization of Dynamic Properties. Sensors & Actuators A, 2006, vol. 132, pp. 195-198.
• [49] Rapiejko P., Paczesny D., Weremczuk J., Jachowicz R., Jurkiewicz D.: Examination of upper airways functions with use of the dew point hygrometer with semiconductor detector. Eur. Respir. J., 2006, 28 (Suppl. 50: Abstracts 15th ERS Annual Congress, Munich, Germany, September 2-6, 2006), p. 861.
• [50] Rapiejko P., Wawrzyniak Z., Jurkiewicz D., Jachowicz R.: Estimation of feature space parameters for aerobiological analysis of pollen grains. European Espiratory Journal, 2006, vol. P3933.
• [51] Jachowicz R.: MEMS in metrology, metrology for MEMS. IEEE Instrumentation and Measurement International Conference 2007, May 1-3, 2007, Warsaw, Poland (referat zaproszony na otwarcie konferencji).
• [52] Paczesny D., Tarapata G., Weremczuk J., Jachowicz R.: Auto-calibration of Dew Point Hygrometer Based on Integrated Semiconductor Detector. Proc. IEEE Instrumentation and Measurement Technology Conference IMTC 2007, Warsaw, Poland, May 1-3, 2007, pp. CD (IM-7109).
• [53] Tarapata G., Weremczuk J., Jachowicz R.: Evaluation of water barrier function of human skin using super fast dew point hygrometer. The 2007 IEEE International Workshop on Medical Measurements and Applications, Warsaw, Poland, May 4-5, 2007, pp. CD (13-17).
• [54] Paczesny D., Weremczuk J., Jachowicz R., Rapiejko P., Jurkiewicz D.: The dynamic measurement of absolute humidity in nasal cavity during respiration. The 2007 IEEE International Workshop on Medical Measurements and Applications, Warsaw, Poland, May 4-5, 2007, pp. CD (81-84).
• [55] Paczesny D., Weremczuk J., Jachowicz R., Rapiejko P., Jurkiewicz D.: Szybki higrometr punktu rosy do badań laryngologicznych - ocena nawilżającej i ogrzewającej funkcja nosa. Kongres Metrologii 2007, Kraków, 9-13 września 2007, PAK, vol. 53, ss. 394-397.
• [56] Tarapata G., Weremczuk J., Jachowicz R.: Standaryzacja miary i systemu do pomiaru zdolności parowania skóry ludzkiej. Kongres Metrologii 2007, Kraków, 9-13 września 2007, PAK, vol. 53, ss. 398-401.
• [57] Paczesny T., Paczesny D., Weremczuk J., Jachowicz R.: Computer Simulation of Routing Protocols for Wireless, Low Power Sensors Network. The IEEE Region 8 International Conference on Computer as a Tool, EUROCON 2007, September 9-12, 2007, Warsaw, Poland, pp. CD (2498-2502).
• [58] Jachowicz R.: Od czujników do MEMS-ów - 50 lat rozwoju. Rozd. 3, ss. 31-56, Wybrane Zagadnienia Współczesnej Metrologii, WAT, 2008 (referat zaproszony na otwarcie konferencji).
• [59] Shan Xuechuan, Maw H. P., Tjeung R. T., Ling S. H., Lu C. W., Jachowicz R.: Microstucture formation on low cofired ceramic green substrates using micro embossing. Microsystem Technologies, vol. 14, no 9-11, October 2008, Springer-Verlag, Berlin/Heidelberg, pp. 1405-1409.
• [60] Jachowicz R., Weremczuk J., Paczesny D., Trapata G.: MEMS Based Dew Point Hygrometer with Optimal Self Adjusted Detection Threshold. Proc.of the 2nd Integration and Commercialization of Micro & Nanosystems – MicroNano'08. Hong Kong, June 3-5 2008, (1-st prize for the best paper).
• [61] Mundlein M., Valentin B., Chabicovsky R., Nicolics J., Weremczuk J., Tarapata G., Jachowicz R.: Comparison of transepidermal water loss (TEWL) measurements with two novel sensors based on different sensing principles. Sensors & Actuators A. 2008, vol, 142, Issue 1. pp. 67-72.
• [62] Paczesny D., Paczesny T., Weremczuk J., Jachowicz R.: Efficiency Evaluation of Designed Wireless Sensor Networks Computer Simulator. EUROSENSORS XXII, 07-10 September 2008, Dresden, Germany, CD.