Mikroelektronika próżniowa

• Autorzy: Górecka-Drzazga A.

Warianty tytułu

EN

Vacuum microelectronics

• Konferencja: Kongres Polskiego Towarzystwa Próżniowego ; Krajowa Konferencja Techniki Próżni (4 ; 8 ; 21-24.09.2008 ; Janów Lubelski, Polska)
• Języki publikacji: PL

Abstrakty

PL

W pracy przedstawiono aktualny stan wiedzy w stosunkowo nowej dziedzinie techniki nazwanej mikroelektroniką próżniową. Opisano właściwości miniaturowych urządzeń mikroelektroniki próżniowej, stosowane materiały i technologie. Przedstawiono podstawowe parametry oraz zastosowania miniaturowych źródeł elektronów, w których katodę stanowią matryce mikroemiterów polowych.

EN

In the work, a state of the art of a relatively new field of technology, called vacuum microelectronics, is presented. Properties of the miniature devices of vacuum microelectronics, applied materials and processes of fabrication are described. The main parameters and applications of the miniature electron sources with field-emitters array cathode are presented.

Słowa kluczowe

PL

mikroelektronika próżniowa; matryca emiterów polowych; polowy emiter krzemowy; płaskie wyświetlacze polowe; emitery polowe z nanorurek węglowych

EN

vacuum microelectronics field-emission array; silicon field-emitter; field emission display; carbon nanotube field-emitter

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Elektronika : konstrukcje, technologie, zastosowania
• Rocznik: 2009
• Tom: Vol. 50, nr 1
• Strony: 58--62
• Opis fizyczny: Bibliogr. 43 poz.

Twórcy

autor

Górecka-Drzazga A.

• Politechnika Wrocławska, Wydział Elektroniki Mikrosystemów i Fotoniki

Bibliografia

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