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Novel gas sensor based on porous silicon measured by photovoltage, photoluminescence, and admittance spectroscopy

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Języki publikacji
EN
Abstrakty
EN
Porous silicon (PSi) layer as gas sensor, based on the change in photoconductivity, photoluminescence and admittance has been presented. PSi layer was prepared by electrochemical dissolution of p-type silicon wafer in HF. Photovoltage curves, photoluminescence spectra (PL) and admittance spectra have been measured in different gas concentrations. Photoconductivity (PC) spectra in vacuum and different gas atmosphere have been compared. Changes of photovoltage intensity curves and change of PC spectra versus concentration of vapour have been observed.
Słowa kluczowe
Twórcy
  • Institute of Physics, N. Copernicus University, 5/7 Grudziądzka Str., 87-100 Toruń, Poland
autor
  • Institute of Physics, N. Copernicus University, 5/7 Grudziądzka Str., 87-100 Toruń, Poland
autor
  • Institute of Physics, N. Copernicus University, 5/7 Grudziądzka Str., 87-100 Toruń, Poland
autor
  • Institute of Physics, N. Copernicus University, 5/7 Grudziądzka Str., 87-100 Toruń, Poland
autor
  • Institute of Physics, N. Copernicus University, 5/7 Grudziądzka Str., 87-100 Toruń, Poland
Bibliografia
  • 1. U. Gösele and V. Lehmann, “Light-emitting porous silicon”, Materials Chemistry and Physics 40, 253–259 (1995).
  • 2. L.T. Canham, “Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers”, Appl. Phys. Lett. 57, 1046–1048 (1990).
  • 3. M.K. Lee, Y.H. Wang, and C.H. Chu, “Characterization of porous silicon photovoltaic devices through rapid thermal oxidation, rapid thermal annealing and HF-dipping processes”, Solar Energy Materials & Solar Cells 59, 59–64 (1999).
  • 4. L.A. Balagurov, S.C. Bayliss, S.Ya. Andrushin, A.F. Orlov, B. Unal, D.G. Yarkin, and E.A Petrova, “Metal/PtSi/c-Si photodetectors based on oxidized porous silicon”, Solid-State Electronics 45, 1607–1611 (2001).
  • 5. L. Pancheri, C.J. Oton, Z. Gaburro, G. Soncini, and L. Pavesi, “Very sensitive porous silicon NO2 sensor”, Sensors and Actuators B89, 237–239 (2003).
  • 6. V.S.-Y. Lin, K. Motesharei, K. S. Dancil, M. J. Sailor, and M. Reza Ghadiri, “A porous silicon-based optical interferometric biosensor”, Science 278, 840–843 (1997).
  • 7. K. Watanabe, T. Okada, I. Choe, and Y. Sato, “Organic vapour sensitivity in a porous silicon device”, Sensors and Actuators B33, 194–197 (1996).
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWA2-0015-0056
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