Distribution of potential barrier height local values at Al-SiO₂ and Si-SiO₂ interfaces of the metal-oxide-semiconductor (MOS) structures

• Autorzy: Piskorski K. , Przewlocki H. M.
• Języki publikacji: EN

Abstrakty

EN

Using the photoelectric measurement methods distributions have been determined of the gate-dielectric E_BG(x,y) and semiconductor-dielectric E_BS(x, y) barrier height values in square gate (1 x 1 mm²) AI-SiO₂Si(n⁺) structures. Measurements have been made on a series of 26 MOS capacitors with semitransparent gates (t_Al= 35 nm), on one silicon wafer. Barrier heights were measured using the modified Powell-Berglund and the modified Fowler methods. Measurement methods were modified in such a way as to allow determination of E_BG(x,y) and E_BS(x,y) distributions, as described in the text. It has been found that the E_BG(x,y) distribution has a characteristic dome-like shape which is identical with the independently determined shape of the effective contact potential difference φ_MS(x,y) distribution. The E_BS(x,y) distribution is of a random character and differences between highest and lowest values of E_BS for any of the measured capacitors are much smaller than the respective differences in E_BG values. These results show that it is the gate-dielectric barrier height distribution E_BG(x,y) which causes the dome-like shape of the F_MS(x,y) distribution, observed for several years in our laboratory. This finding supports aur hypothesis that the characteristic F_MS(x,y) distribution over the gate area of Al-SiO₂-Si structures resuIts from the mechanical stress distribution under the gate electrode.

• Wydawca: Institute of Electron Technology
• Czasopismo: Electron Technology : Internet Journal
• Rocznik: 2004
• Tom: Vol. 36, nr 5
• Strony: 1--5
• Opis fizyczny: Bibliogr. 12 poz., wykr.

Twórcy

autor

Piskorski K.

• lnstitute of ElectronTechnology, al. Lotników 32/46, 02-668 Warszawa, Poland

autor

Przewlocki H. M.

• lnstitute of ElectronTechnology, al. Lotników 32/46, 02-668 Warszawa, Poland

Bibliografia

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