Photoelectronic measurement methods and the universal measurement system for precise parameter determination of semiconductor structures

• Autorzy: Machalica P. , Porębski S. , Zając J. , Borowicz L. , Kudła A. , Przewłocki H. M.
• Języki publikacji: EN

Abstrakty

EN

In this article a new Multifunctional System for Photoelectric Measurements of Semiconductor Structures (MSPM) is presented. The system enables very accurate photocurrent measurements at levels as low as 10 fA. Measured structures can be biased by sequences of DC voltages and stimulated by light beams of predefined wavelengths and powers. The software controls all the system actions allowing flexibility in retrieving data stored in the related databases.

• Wydawca: Institute of Electron Technology
• Czasopismo: Electron Technology : Internet Journal
• Rocznik: 2001/2002
• Tom: Vol. 34, nr 5
• Strony: 1--7
• Opis fizyczny: Bibliogr. 18 poz.

Twórcy

autor

Machalica P.

• Industrial Institute of Electronics, 00-241 Warsaw, 44/50 Długa Str, Poland

autor

Porębski S.

• Industrial Institute of Electronics, 00-241 Warsaw, 44/50 Długa Str, Poland

autor

Zając J.

• Industrial Institute of Electronics, 00-241 Warsaw, 44/50 Długa Str, Poland

autor

Borowicz L.

• Industrial Institute of Electronics, 00-241 Warsaw, 44/50 Długa Str, Poland

autor

Kudła A.

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

autor

Przewłocki H. M.

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

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