Tytuł artykułu
Autorzy
Wybrane pełne teksty z tego czasopisma
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Warianty tytułu
Konferencja
International Conference on Solid State Crystals : Material Science and Applications (4ICSSC) and Polish Conference on Crystal Growth (7PCCG) ; (16-20.05.2004 ; Zakopane-Kościelisko, Poland)
Języki publikacji
Abstrakty
The effect of high temperature (HT) up to 1400 K and high pressure (HP) up to 1.1 GPa on Cz-Si co-implanted with He⁺ (energy, E = 50 KeV, dose, DHe = 5x10¹⁶ cm⁻²) and H₂⁺ (E = 135 KeV, DH 5x10¹⁶ cm⁻²), with almost overlapping implantation- disturbed layers, has been investigated. Numerous extended defects are created at HT and HP near the He and H concentration peaks, the overall structural perfection of annealed Si:He,H improves with HP. Oxygen gettering in the implantation- disturbed areas is much less pronounced under HP. The observed effects are related, among others, to decreased hydrogen out-diffusion and lowered dimensions of gas filled defects in Si:He,H treated under HP. Qualitative explanation of HP-mediated gettering of oxygen has been proposed.
Słowa kluczowe
Wydawca
Czasopismo
Rocznik
Tom
Strony
383--387
Opis fizyczny
Bibliogr. 7 poz.
Twórcy
autor
- Institute of Electron Technology, 46 Lotników Ave., 02-668 Warsaw, Poland
autor
- Institute of Electron Technology, 46 Lotników Ave., 02-668 Warsaw, Poland
autor
- Institute of Electronic Materials Technology, 133 Wólczyńska Str., 01-119 Warsaw, Poland
autor
- Institute of Physics, PAS, 32/46 Lotników Str., 02-668 Warsaw, Poland
autor
- Institute of Electronic Materials Technology, 133 Wólczyńska Str., 01-119 Warsaw, Poland
Bibliografia
- 1. X. Duo, W. Liu, S. Xing, M. Zhang, X. Fu, C. Lin, P. Hu, S.X. Wang, and L.M. Wang, J. Phys. D: Appl. Phys. 34, 5 (2001).
- 2. A. Misiuk, A. Barcz, J. Ratajczak, and J. Bąk-Misiuk, Solid State Phen. 95/96, 313 (2004).
- 3. A. Misiuk, J. Ratajczak, A. Barcz, J. Bąk-Misiuk, A. Shalimov, B. Surma, A. Wnuk, J. Jagielski, and I.V. Antonova, submitted to Int. J. Hydrogen Energy.
- 4. A. Misiuk, Mater. Phys. Mech. 1, 119 (2000).
- 5. S. Binetti, S. Pizzini, E. Leoni, R. Somaschini, A. Castaldini, and A. Cavallini, Solid State Phen. 82-84, 75 (2002).
- 6. A. Misiuk, A. Barcz, V. Raineri, J. Ratajczak, J. Bąk-Misiuk, I.V. Antonova, W. Wierzchowski, and K. Wieteska, Physica B308-310, 317 (2001).
- 7. A. Misiuk, A. Barcz, J. Ratajczak, J. Bąk-Misiuk, I.V. Antonova, and V.P. Popov, Physica B340-342, 659 (2003).
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWA2-0010-0023