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HgCdTe epilayers on GaAs : growth and devices

Wybrane pełne teksty z tego czasopisma
Identyfikatory
Warianty tytułu
Konferencja
Third International Conference on Solid State Crystals. Materials Science and Applications. ICSSC '2002 ; (14.10-18.10.2002 ; Zakopane, Poland)
Języki publikacji
EN
Abstrakty
EN
View of basic and specific physical and chemical features of growth and defect formation in mercury cadmium telluride (MTC) heterostructures (HS's) on GaAs substrates by molecular beam epitaxy (MBE) was made. On the basis of this knowledge a new generation of ultra high vacuum set, ultra-fast ellipsometer of high accuracy and automatic system for control of technological processes was produced for reproducibility of growth MCT HS's on substrates up to 4'' in diameter. The development of industrially oriented technology of MCT HS's growth by MBE on GaAs substrates 2'' in diameter and without intentional doping is presented. The electrical characteristics of n-type and p-type of MCT HS's and uniformity of MCT composition over the surface area are excellent. The residual donor and acceptor centres are supposed as hypothetically tellurium atoms in metalic sublattice ("antisite" tellurium) and double-ionised mercury vacancies. The technology of fabricating focal plane arrays is developed. The high quality characteristics of infrared detectors conductance and diode mode are measured. Calculations of detector parameters predicted the improvement in serial resistance and detectivity of infrared diode detectors based on MCT heterostructures with graded composition throughout the thickness.
Twórcy
  • Institute of Semiconductor Physics SB RAS, 13 Lavrentieva Av., 630090 Novosibirsk, Russia
  • Institute of Semiconductor Physics SB RAS, 13 Lavrentieva Av., 630090 Novosibirsk, Russia
  • Institute of Semiconductor Physics SB RAS, 13 Lavrentieva Av., 630090 Novosibirsk, Russia
  • Institute of Semiconductor Physics SB RAS, 13 Lavrentieva Av., 630090 Novosibirsk, Russia
autor
  • Institute of Semiconductor Physics SB RAS, 13 Lavrentieva Av., 630090 Novosibirsk, Russia
  • Institute of Semiconductor Physics SB RAS, 13 Lavrentieva Av., 630090 Novosibirsk, Russia
  • Institute of Semiconductor Physics SB RAS, 13 Lavrentieva Av., 630090 Novosibirsk, Russia
  • Institute of Semiconductor Physics SB RAS, 13 Lavrentieva Av., 630090 Novosibirsk, Russia
autor
  • Institute of Semiconductor Physics SB RAS, 13 Lavrentieva Av., 630090 Novosibirsk, Russia
Bibliografia
  • 1. J.P. Zanatta, P. Ferret, G. Theret, A. Million, M. Volny, J.P. Chamonal, and G. Destefanis, "Heteroepitaxy of HgCdTe (211)B on Ge substrates by molecular beam epitaxy for infrared detectors", J. Electron. Mat. 27, 542 (1998).
  • 2. S.D. Chen, L. Lin, X.Z. He, Z.Y. Xu, C.P. Luo, and J.Z. Xu, "High-resolution photoluminescence studies of (211) CdTe grown on (211) GaAs substrate", J. Cryst. Growth 140, 287 (1994).
  • 3. Yu.G. Sidorov, S.A. Dvoretsky, V.S. Varavin, N.N. Mikhailov, M.V. Yakushev, and I.V. Sabinina, "Molecular beam epitaxy of mercury cadmium telluride solid solution on alternative substrate", Semiconductors 35, 1092 (2001).
  • 4. K. Kokie, T. Tanaka, S. Li, and M. Yano, "High-quality CdTe growth in the (100)-orientation on (100) GaAs substrate by molecular beam epitaxy", J. Cryst. Growth 227-228, 671 (2001).
  • 5. T.J. de Lyon, D. Rajavel, S.M. Johnson, and C.A. Cockrum, "Molecular-beam epitaxial growth of CdTe(112) on Si(112) substrates", Appl. Phys. Lett. 66, 2129 (1995).
  • 6. M. Kawano, A. Ajisawa, N. Oda, M. Nagashirna, and H. Wada, "HgCdTe and CdTe(1 1 3) B growth on Si(112)5° off by molecular beam epitaxy", Appl. Phys. Lett. 69, 2876 (1996).
  • 7. D.J. Smith, S.C. Y. Tsen, D. Chandrasekhar, P.A. Crozier, S. Rujirawat, G. Brill, Y.P. Chen, R. Sporken, and S Sivananthan, "Growth and characterization of CdTe/Si heterostructures - effect of substrate orientation", Mat. Sci&Eng. B77, 93 (2000).
  • 8. R.E DeWames, D.D. Edwall, M. Zandian, L.O. Bubulac, J.G. Pasko, W.E. Tennant, J.M. Atias, and A. D'Souza. "Dark current generating mechanism in shot wavelength infrared photovoltaic detectors", J. Electron. Mat. 27, 772 (1998).
  • 9. A. D'Souza, J Bajaj, R.E DeWarnes, D.D. Edwall, P.S. Wijewarnasurija, and N. Nayar, "MWIR DLPH HgCdTe perfomance dependence on substrate material", J. Electron. Mat. 27, 727 (1998).
  • 10. V.V. Vasiliev, D.G. Esaev, T.I. Zakhariyash, A.G. Klimenko, A.I. Kozlov, I.V. Marchishin, V.N. Ovsyuk, N.Kh. Talipov, Yu.G. Sidorov, and S.A. Dvoretsky, "128x128 hybrid FPA using MBE HgCdTe films on GaAs substrates. Optoelectronics", Instrument & Data Process. N4, 22 (1998).
  • 11. A. D'Souza, L.C. Daw on, C. Staller, P.S. Wijewarnasurija, R.E DeWames, W.V. MacLevige, J.M. Arias, D. Edwall, and G. Hilderbrandt. "Large VLWIR HgCdTe photovoltaic detector", J. Electr. Mat. 29, 630 (2000).
  • 12. S.M. Johnson, J.L. Johnson, W.J. Hamilton, D .B. Leonard, T.A. Strand, E.A. Patten, J.M. Peterson, J.H. Durharn, V.K. Randall, T.J. deLyon, J.E. Jensen, and M.D. Gorwitz, "HgCdZnTe quaternary materials for lattice-matched two-colour detectors", J. Electron. Mater. 29, 680 (2000).
  • 13. J.M. Arias, R.E. DeWarnes, S.H. Shin, J.G. Pasko, J.S. Chen, and E.R. Gerther, "Infrared diodes fabricated with HgCdTe grown by molecular beam epitaxy on GaAs substrates", Appl. Phys. Lett. 54, 1025 (1989).
  • 14. K. Jóźwikowski, and A. Rogalski, "Effect of dislocations on performance of LWIR HgCdTe photodiodes", J. Electron. Mater. 29, 736 (2000).
  • 15. J.M. Arias, M. Zandian, S.H. Shin, W.V. McLevige, J.G. Pasko, and R.E. DeWames, "Dislocation density reduction by thermal annealing of HgCdTe epilayers grown by molecular beam epitaxy on GaAs substrates", J. Vac. Sci. Technol. B9, 1646 (1991).
  • 16. V.M. Osadchy, A.O. Suslyakov, V.V. Vasiliev, S.A Dvoretsky, "Effective carriers lifetime in varizone structures on CdHgTe", Fizika Technika Poluprovodnikov, 33, 293 (1999). (in Russian).
  • 17. Y. Nemirovsky, R. Fastow, M. Meyassed, and A. Unikovsky., "Trapping effects in HgCdTe", J. Vae. Sci. Technol. B9, 1829 (1991).
  • 18. M. Tanaka, K. Ozaki, N. Nishino, H. Be, and Y Miyamoto, "Electrical properties of HgCdTe doped with silver using an AgNO3 solution", J. Mater. Sci. 27, 579 (1998).
  • 19. J.M. Arias, "Growth of HgCdTe by molecular beam epitaxy" in Properties of Narrow Gap Cadmium-based Compounds, edited by P. Capper, p. 30, INSPEC, Institution of Electrical Engineers, London, United Kindom, 1994.
  • 20. Yu.G. Sidorov and E.M. Trukhanov, "About possibility of formation of amorphous phase at heterostructure forrnation with large lattice mismatch", Poverhnost N6, 106, (1992). (in Russian).
  • 21. S.A. Dvoretsky, V.P. Zubkov, V.V. Kalinin, V.D. Kuzmin, and Yu.G. Sidorov, "Investigation of initial stage at molecular beam epitaxy of CdTe on GaAs(l00)", Poverhnost N9, 45 (1991). (in Russian).
  • 22. Yu.G. Sidorov, S.A. Dvoretsky, M.V. Yakushev, N.N. Mikhailov, V.S. Varavin, and V.I. Liberman, "Peculiarities of the MBE growth physics and technology of narrow-gap II-VI cornpounds", Thin Solid Films 306, 253 (1997). (in Russian).
  • 23. E.V. Spesivtsev and S.V. Rykhlitski, "Ellipsometer", Inventor's certificate RF No. 16314 of 20.12.2000. (in Russian).
  • 24. Yu .G Sidorov, S.A. Dvoretsky, N.N. Mikhailov, M.V. Yakushev, V.S. Varavin, and A.P. Antsiferov, "Molecular beam epitaxy of narrow gap compositions CdxHg1-xTe. Equipment and technology", Optichesky Zhournal 67, 39 (2000). (in Russian).
  • 25. V.S. Varavin, S.A. Dvoretsky, N.N. Mikhailov, and Yu.G. Sidorov, "Donor defects in HgCdTe epitaxial layers grown by molecular beam epitaxy", Avtometriya N3, 9 (2001). (inRussian).
  • 26. V.S. Varavin, S.A. Dvoretsky, V.I. Liberrnan, N.N. Mikhailov, and Yu.G. Sidorov, "Molecular beam epitaxy of high quality HgCdTe films with control of composition distribution", J. Cryst. Growth 159, 1161 (1996).
  • 27. A.V. Voitsekhovsky, Yu.A. Denisov, A.P. Kokhanenko, V.S. Varavin, S.A. Dvoretsky, N.N. Mikhailov, Yu .G. Sidorov, and M.V. Yakushev. "Peculiarities of spectral and recombination characteristics of MBE structures on CdHgTe", Avtometriya N4, 47 (1998). (in Russian).
  • 28. Yu.G. Sidorov, S.A. Dvoretsky, N.N. Mikhailov, M.V. Yakushev, V.S. Varavin, V.V. Vasiliev, A.O. Suslyakov, and V.N. Ovsyuk, "MCT heterostructures designing and growing by MBE for IR devices", Prikladnaya Fizika N5, 54 (2000).
  • 29. E.V. Susov, Yu.G. Sidorov, V.N. Severtsev, A.A. Komov, G.V. Chekanova, S.A. Dvoretsky, V.S. Varavin, N.N. Mikhailov, and L.I. D'yakonov, "Multielement photoresistor with HgCdTe heterostructures", Avtometriya N4, 40 (1996). (in Russian).
  • 30. E.V. Susov, V.S. Varavin, S.A. Dvoretsky, N.N. Mikhailov, and G.V. Chekanova, "128-element cooled IR devices based on CdHgTe heteroepitaxial structures", Instrument & Data Process N4, 17 (1998).
  • 31. V.V. Vasiliev, S.A. Dvoretsky, D.G. Esaev, T.I. Zakhariyash, A.G. Klimenko, A.I. Kozlov, I.V. Marchishin, V.N. Ovsyuk, N.Kh. Talipov, Yu.G. Sidorov, and A.O. Suslyakov, "Photodetectors on the basis of CdHgTe layers grown by molecular beam epitaxy", Avtometriya N3, 4 (2000). (in Russian).
  • 32. V.S. Varavin, V.V. Vasiliev, T.I. Zakhariyash, S.A. Dvoretsky, N.N. Mikhailov, V.N. Ovsyuk, V.M. Osadchy, Yu.G. Sidorov, and A.O. Suslyakov, "Phototdiodes with low serial resistance with graded band gap HgCdTe epitaxial films", Optichesky Zhoumal 66, 69 (1999). (in Russian).
  • 33. A. Rogalski and J. Piotrowski, "Intrinsic infrared detectors", Prog. Quant. Electron. 12, 87 (1988).
  • 34. W.W. Anderson, "Absorption constant of Pb1-xSnxTe and Hg1-xCdxTe alloys", Infrared Phys. 20, 363 (1980).
  • 35. K.M. Van Vlliet and A.H. Marshak, "The Shockley-like equation for the carrier densities and current flow in materials with a nonuniform composition", Solid State Electron. 23, 49 (1980).
  • 36. V.N. Ovsyuk, V.V. Vasiliev, N .Kh. Talipov, L.N. Romashko, A.I. Kozlov, and I.V. Marchishin, "Photodetectors on basis of HgCdTe films grown by molecular beam epitaxy", in Matrichnie Fotopriemnie Ustroistva Infrakrasnogo Diapasona, edited by S.P. Sinitsa, p. 179, Nauka, Novosibirsk, 2001.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWA2-0007-0004
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