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Codoping in p-type, epitaxial GaN grown by metal-organic vapour phase epitaxy (MOVPE) was investigated. An enhancement of hole concentration was observed experimentally in p-type GaN:Mg codoped with oxygen donors. The hole concentration of GaN:Mg codoped with oxygen increased super-linearly from 8x10¹⁶ to 2x10¹⁸ cm⁻³ upon increasing the oxygen dopant partial pressure. A factor of 3-5 enhancement of hole concentration was measured for a fixed oxygen partial pressure during the growth of p-type GaN:Mg. However, when Si was codoped with GaN:Mg, the hole concentration remained constant. Current experimental results are compared with the existing theory of codoping in GaN.
Słowa kluczowe
Wydawca
Czasopismo
Rocznik
Tom
Strony
243--249
Opis fizyczny
Bibliogr. 27 poz.
Twórcy
autor
- Northwestern University, Materials Research centre and Materials Science and Engineering Department, Evanston, IL 60208, USA
autor
- Northwestern University, Materials Research centre and Materials Science and Engineering Department, Evanston, IL 60208, USA
autor
- Northwestern University, Materials Research centre and Materials Science and Engineering Department, Evanston, IL 60208, USA
Bibliografia
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- 4. R. Y. Korotkov and B. W. Wessels, "Electrical properties of oxygen doped GaN grown by metalorganic vapour phase epitaxy", MRS Internet J. Nitride Semicond. Res. 5S1, W3.80 (2000).
- 5. U. Kaufmann, P. Schlotter, H. Obloh, K. Kohler, and M. Maier, "Hole conductivity and compensation in epitaxial GaN:Mg layers", Phys. Rev. B62, 10867-10872 (2000).
- 6. R. Y. Korotkov, J. M. Gregie, and B. W. Wessels, "Electrical properties of p-type GaN:Mg codoped with oxygen", Appl. Phys. Lett. 78, 222-224 (2001).
- 7. S. Nakamura, N. Iwasa, M. Senoh, and T. Mukai, "Hole compensation mechanism of p-type GaN films", Jpn. J. Appl. Phys. 31, 1258-1266 (1992).
- 8. C. G. Yan de Walle, C. Stampfl, and J. Neugebauer, "Theory of doping and defects in III-V nitrides", J. Cryst. Growth 189-190, 505-510 (1998).
- 9. S. B. Zhang, S. H. Wei, and A. Zunger, "Microscopic origin of the phenomenological equilibrium 'doping limit rule' in n-type III-V semiconductors", Phys. Rev. Lett. 84, 1232-1235 (2000).
- 10. U. Kaufmann, M. Kunzer, M. Maier, H. Obloh, A. Ramakrishnan, and B. Santic, "Nature of the 2.8 eV photoluminescence band in Mg doped GaN", Appl. Phys. Lett. 72, 1326-1328 (1998).
- 11. F. Shahedipour and B. W. Wesels, "Investigation of the formation of the 2.8 eV luminescence band in p-type GaN:Mg", Appl. Phys. Lett. 76, 3011-3013 (2000).
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- 15. H. Katayama-Yoshida, R. Kato, and T. Yamamoto, "New valence control and spin control method in GaN and AlN by codoping and transition atom doping", J. Cryst. Growth 231, 428-436 (2001).
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- 20. K. S. Kim, C. S. Oh, M. S. Han, C. S. Kim, G. M. Yang, C. H. Hong, C. J. Youn, K. Y. Lim, and H. J. Lee, "Co-doping characteristics of Si and Zn with Mg in p-type GaN", MRS Internet J. Nitride Semicond. Res. 5S1, W3.84 (2000).
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- 24. U. Kaufmann, M. Kunzer, M. Maier, H. Obloh, A. Ramakrishnan, B. Santic, and P. Schlotter, "Nature of the 2.8 eV photoluminescence band in Mg doped GaN", Appl. Phys. Lett. 72, 1326-1328 (1998).
- 25. R. Y. Korotkov, J. M. Gregie, and B. W. Wessels, "Photoluminescence studies of p-type GaN:Mg co-doped with oxygen", Mater. Res. Soc. Symp. Proc. 639, 06.39.1-5 (2001).
- 26. Y. Marfaing, "Phenomenological analysis of codoping role of statistical fluctuations", Phys. Stat. Sol. B229, 229-238 (2002).
- 27. S. H. Chung, M. Lachab, T. Wang, Y. Lacroix, D. Basak, Q. Fareed, Y. Kawakami, K. Nishino, and S. Sakai, "Effect of oxygen on the activation of Mg acceptor in GaN epilayers grown by metalorganic chemical vapour deposition", Jpn. J. Appl. Phys. 39, 4749-4750, Part 1 (2000).
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Bibliografia
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