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Codoping of wide gap epitaxial III-Nitride semiconductors

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Języki publikacji
EN
Abstrakty
EN
Codoping in p-type, epitaxial GaN grown by metal-organic vapour phase epitaxy (MOVPE) was investigated. An enhancement of hole concentration was observed experimentally in p-type GaN:Mg codoped with oxygen donors. The hole concentration of GaN:Mg codoped with oxygen increased super-linearly from 8x10¹⁶ to 2x10¹⁸ cm⁻³ upon increasing the oxygen dopant partial pressure. A factor of 3-5 enhancement of hole concentration was measured for a fixed oxygen partial pressure during the growth of p-type GaN:Mg. However, when Si was codoped with GaN:Mg, the hole concentration remained constant. Current experimental results are compared with the existing theory of codoping in GaN.
Słowa kluczowe
Twórcy
  • Northwestern University, Materials Research centre and Materials Science and Engineering Department, Evanston, IL 60208, USA
autor
  • Northwestern University, Materials Research centre and Materials Science and Engineering Department, Evanston, IL 60208, USA
  • Northwestern University, Materials Research centre and Materials Science and Engineering Department, Evanston, IL 60208, USA
Bibliografia
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Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWA2-0006-0095
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