A hollow cathode discharge modification as a of sputtered atoms and their ions

• Autorzy: Zhechev D. , Tileva S. , Mishinsky G. V. , Zhemenik V. I.
• Języki publikacji: EN

Abstrakty

EN

A nonconvectional hollow cathode discharge (HCD) modification grounded on a conical bottom (CB) cylindrical cathode is reported. this CBHCD enhances the main HCD property, i.e., the sputtering of the cathode surface/probe inserted. Comparative polarisation measurements with a conventional flat bottom HCD show a stronger narrowing of the Hanle signal width for the sputtered Cu atoms in CBHCD.This their density is higher in CBHCD. This result is specified by the redial optogalvanic profile. It contains two peaks of the mentioned density, i.e., near the cylindrical cathode surface and over the cone peak. Some preliminary examinations of CBHCD as an ion source in three arrangements are performed and discussed.

Słowa kluczowe

EN

hollow cathode discharge; self-alignment; optogalvanic effect; ion source

• Wydawca: Stowarzyszenie Elektryków Polskich ; Polska Akademia Nauk ; Wojskowa Akademia Techniczna im. Jarosława Dąbrowskiego
• Czasopismo: Opto-Electronics Review
• Rocznik: 2001
• Tom: Vol. 9, No. 4
• Strony: 419--422
• Opis fizyczny: Bibliogr. 5 poz.

Twórcy

autor

Zhechev D.

autor

Tileva S.

autor

Mishinsky G. V.

autor

Zhemenik V. I.

• Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., BG-1784 Sofia, Bulgaria,