Recent ad advances in silicon quided-wave MOEMS: from technology to applications

• Autorzy: Gorecki C.
• Konferencja: The Second School of Photonics in Information Processing ; (7.11-11.11.2000 ; Stare Jabłonki , Poland)
• Języki publikacji: EN

Abstrakty

EN

We will discuss the recent developments in the field of quided-wave MOEMS, The goal well be to review the processes involved in the fabrication of silicon-based optical wavequides and will proceed to describe and analyse how this photonic technology may be integrated within the MEMS environment. Finally, some examples of optical functions that can benefit by the integration of optical wavequides with MEMS will be described, such as integrated optic switches, integrated optical modulators, micromachined optical sensors, and microprobes for optical near-field microscopy.

Słowa kluczowe

EN

optical MEMS; silicon micromachining; integred optics

• Wydawca: Stowarzyszenie Elektryków Polskich ; Polska Akademia Nauk ; Wojskowa Akademia Techniczna im. Jarosława Dąbrowskiego
• Czasopismo: Opto-Electronics Review
• Rocznik: 2001
• Tom: Vol. 9, No. 3
• Strony: 248--256
• Opis fizyczny: Bibliogr. 23 poz.

Twórcy

autor

Gorecki C.

• LOPMD-Institut des Microtechniques de Franche-Comte, 32 Ave. de l'Observatoire, 25044 Besancon Cedex, France,