Uncooled thermo-mechanical detector array with optical readout

• Autorzy: Torun H. , Urey H.
• Konferencja: Infrared Photodetectors (IPH) ; (30-31.08.2005, Warsaw, Poland)
• Języki publikacji: EN

Abstrakty

EN

This paper reports a novel uncooled infrared FPA whose performance is comparable to the cooled FPA’s in terms of noise parameters. FPA consists of bimaterial microcantilever structures that are designed to convert IR radiation energy into mechanical energy. Induced deflection by mechanical energy is detected by means of optical methods that measure sub nanometer thermally induced deflections. Analytical solutions are developed for calculating the figure of merits for the FPA. FEM simulations and the analytical solution agree well. Calculations show that for an FPA, NETD of < 5 mK is achievable in the 8–12 um band. The design and optimization for the detectors are presented. The mechanical structure of pixels is designed such that it can be possible to form large array size FPA’s. Microfabrication of the devices to improve the performance further, employs low cost standard MEMS processes.

Słowa kluczowe

EN

infrared detectors; optical sensor; bi-material cantilever

• Wydawca: Stowarzyszenie Elektryków Polskich ; Polska Akademia Nauk ; Wojskowa Akademia Techniczna im. Jarosława Dąbrowskiego
• Czasopismo: Opto-Electronics Review
• Rocznik: 2006
• Tom: Vol. 14, No. 1
• Strony: 55--60
• Opis fizyczny: Bibliogr. 8 poz., il., wykr.

Twórcy

autor

Torun H.

autor

Urey H.

• Koç University, Sariyer, 34450 Instanbul, Turkey,

Bibliografia

• 1. S. Eminoglu, M.Y. Tanrikulu, and T. Akin, "Low-cost 64x64 uncooled infrared detector arrays in standard CMOS", Proc. 12th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'03) 1, 316-319 (2003).
• 2. D.F. Murphy, M. Ray, R. Wyles, J.F. Asbrock, N.A. Lum, A. Kennedy, J. Wyles, C. Hewitt, G.E. Graham, T. Horikiri, J.S. Anderson, D. Bradley, R. Chin, and T. Kostrzewa, "High sensitivity (25 um pitch) microbolometer FPAs", Proc. SPIE 4454, 147-159 (2001).
• 3. P.W. Kruse, "Principle of uncooled infrared focal plane arrays", Semiconductors and Semimetals 47, 17-44 (1997).
• 4. S.R. Hunter, R.A. Amantea, L.A. Godman, D.B. Kharas, S. Gershtein, J.R. Matey, S.N. Perna, Y. Yu, N. Maley, and L.K. White, "High sensitivity uncooled microcantilever infrared imaging arrays", Proc. SPIE 5074, 469-480 (2003).
• 5. Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, "Optomechanical uncooled infrared imaging system: design, microfabrication, and performance", J. Microelectromech. Syst. 11, 136-146 (2002).
• 6. Y. Zhao, "Optomechanical uncooled infrared imaging system", PhD Dissertation, University of California, Berkeley, Fall 2002.
• 7. H. Torun, H. Urey, and F. DeWitt, "Thermal deformation and athermalization of multil layered MEMS structures", submitted (2005).
• 8. P.G. Datskos, N.V. Lavrik, and S. Rajic, "Performance of uncooled microcantilever thermal detectors", Review of Scientific Instruments 75, 1134-1148 (2004).