Uncooled microbolometer detector: recent developments at ULIS

• Autorzy: Tissot J. L. , Trouilleau C. , Fieque B. , Crastes A. , Legras O.
• Konferencja: Infrared Photodetectors (IPH) ; (30-31.08.2005, Warsaw, Poland)
• Języki publikacji: EN

Abstrakty

EN

Uncooled infrared focal plane arrays are being developed for a wide range of thermal imaging applications. Fire-fighting, predictive maintenance, process control and thermography are a few of the industrial applications which could take benefit from uncooled infrared detector. Therefore, to answer these markets, a 35-µm pixel-pitch uncooled IR detector technology has been developed enabling high performance 160x120 and 384x288 arrays production. Besides a wide-band version from uncooled 320x240/45 µm array has been also developed in order to address process control and more precisely industrial furnaces control. The ULIS amorphous silicon technology is well adapted to manufacture low cost detector in mass production. After some brief microbolometer technological background, we present the characterization of 35 µm pixel-pitch detector as well as the wide-band 320x240 infrared focal plane arrays with a pixel pitch of 45 µm.

Słowa kluczowe

EN

uncooled IRFPA; 2D array; MWIR; LWIR; microbolometer; amorphous silicon

• Wydawca: Stowarzyszenie Elektryków Polskich ; Polska Akademia Nauk ; Wojskowa Akademia Techniczna im. Jarosława Dąbrowskiego
• Czasopismo: Opto-Electronics Review
• Rocznik: 2006
• Tom: Vol. 14, No. 1
• Strony: 25--32
• Opis fizyczny: Bibliogr. 5 poz., il., wykr.

Twórcy

autor

Tissot J. L.

autor

Trouilleau C.

autor

Fieque B.

autor

Crastes A.

autor

Legras O.

• ULIS, BP 27 - 38113 Veurey-Voroize, France,

Bibliografia

• 1. C. Vedel, J.L. Martin, J.L. Ouvrier-Buffet, J.L. Tissot, M. Vilain, and J.J. Yon, "Amorphous silicon based uncooled microbolometer IRFPA", Proc. SPIE 3698, 276-283 (1999).
• 2. C. Trouilleau, A. Crastes, J.L. Tissot, J.P. Chatard, and S. Tinnes, "Amorphous silicon based uncooled microbolometer IRFPA", Proc. SPIE 5251, 272-279 (2003).
• 3. J.L. Tissot, M. Vilain, A. Crastes , S. Tinnes, A. Larre, O. Legras, and J.J. Yon "Uncooled IRFPA with high performance and low thermal time constant", Proc. SPIE 5612, 72-77 (2004).
• 4. J.J. Yon, A. Astier, S. Bisotto, G. Chamings, A. Durand, J.L. Martin, E. Mottin, J.L. Ouvrier-Buffet, and J.L. Tissot, "First demonstration of 25-um pitch uncooled amorphous silicon microbolometer IRFPA at LETI-LIR", SPIE Proc. 5783, 432-440 (2005).
• 5. B.D. Oelrich, A. Crastes, C.I. Underwood, and S. Mackin, "A low-cost mid-wave IR microsatellite image concept based on uncooled technology", Proc. SPIE 5570, 209-217 (2004).