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A high-quality AlGaN layer with a low density of threading dislocations is realised for the use of ultraviolet (UV) light-emitting diodes (LEDs). The new crystal growth method of using a GaN seed crystal with (1122) facets and lateral growth of Al₀.₂₂Ga₀.₇₈N through the low -temperature-deposited AlN interlayer enalbles the overgrown Al₀.₂₂Ga₀.₇₈N to have a low dislocation density of 2 x 10⁷ cm⁻² and be crack-free over the whole wafer. Applying the AlGaN as a base layer in UV-LEDs, high - performance devices with high output powers of more than 0.1 mW under 50 mA drive are demonstrated in a wide range of emission wavelengths from 323 to 363 nm. The highest output power of 1.2 mW at 50 mA driving current is obtained with 363 - nm emission wavelength.
Słowa kluczowe
Wydawca
Czasopismo
Rocznik
Tom
Strony
225--230
Opis fizyczny
Bibliogr. 14 poz
Twórcy
autor
- Faculty od Science and Technology and Hifht-Tech Research Centre, Meijo University, 1-501 Shiogamauchi, Tempaku-ku, Nagoya 468-8502, Japan
autor
- Faculty od Science and Technology and Hifht-Tech Research Centre, Meijo University, 1-501 Shiogamauchi, Tempaku-ku, Nagoya 468-8502, Japan
autor
- Faculty od Science and Technology and Hifht-Tech Research Centre, Meijo University, 1-501 Shiogamauchi, Tempaku-ku, Nagoya 468-8502, Japan
autor
- Faculty od Science and Technology and Hifht-Tech Research Centre, Meijo University, 1-501 Shiogamauchi, Tempaku-ku, Nagoya 468-8502, Japan
Bibliografia
- 1. H. Amano, N. Sawaki, I. Akasaki, and T. Toyoda, Appl. Phys. Lett. 48, 353-355 (1986).
- 2. H. Amano, M. Kito, K. Hiramatsu, and I. Akasaki, Jpn. J. Appl. Phys. 28, L2112-L2114 (1989).
- 3. I. Akasaki, H. Amano, K. Itoh, N. Koide, and K. Manabe, Inst. Phys. Conf Ser. 129, 851-856 (1992).
- 4. S. Nakamura, T. Mukai, and M. Senoh, Appl. Phys. Lett. 64, 1687-1689 (1994).
- 5. I. Akasaki, H. Amano, S. Sota, H. Sakai, T. Tanaka, and M. Koike, Jpn. J. Appl. Phys. 34, L1517-L1519 (1995).
- 6. S. Nakamura, M. Senoh, S. Nagahara, N. Iwasa, T. Yamada, T. Matsushita, Y. Sugimoto, and H. Kiyoku, Appl. Phys. Lett. 37, 4056-4058 (1996).
- 7. T. Mukai and S. Nakamura, Jpn. J. Appl. Phys. 38, 5735-5739 (1999).
- 8. H. Hirayama, A. Kinoshita, A. Hirata, and Y. Aoyagi, Phys. Stat. Sol. (a) 188, 83-89 (2001).
- 9. M. A. Khan, V. Adivarahan, J. P. Zhang, C. Chen, E. Kuokstis, A. Chitnis, M. Shatalov, J. W. Yang, and G. Simin, Jpn. J. Appl. Phys. 40, L1308-L1311 (2001).
- 10. T. Nishida and N. Kobayashi, Phys. Stat. Sol. (a) 188, 113-116 (2001).
- 11. M. Iwaya, R. Nakamura, S. Terao, T. Ukai, S. Kamiyama, H. Amano, and I. Akasaki, Proc. Int. Workshop on Nitride Semiconductors, IPAP Conf. Series 1, Nagoya, Sept. 24-27, 833-836 (2000).
- 12. S. Kamiyama, M. Iwaya, N. Hayashi, T. Takeuchi, H. Amano, I. Akasaki, S. Watanabe, Y. Kaneko, and N. Yamada, J. Crystal Growth 223, 83-91 (2001).
- 13. S. Kamiyama, M. Iwaya, S. Takanami, S. Terao, A. Miyazaki, H. Amano, and I. Akasaki, (to be published in Phys. Stat. Sol.)
- 14. A. Usui, H. Sunakawa, A. Sakai, and A. A. Yamaguchi, Jpn. J. Appl. Phys. 36, L899-L901 (1997).
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWA1-0002-0084