Strain in multilayered systems and its influence on asymmetric X-ray diffraction profiles

• Autorzy: Chocyk D. , Gładyszewski G. , Pienkos T. , Gładyszewski L.
• Konferencja: Surface and Thin Film Structures' 1999 (7 ; 15-18.09.1999 ; Kazimierz Dolny, Poland)
• Języki publikacji: EN

Abstrakty

EN

The paper presents the results of the validity test of the sin²Ψ method applied for determining strains in a case of multilayer systems. The calculations were performed using three-dimensional model based on a Monte Carlo simulation and the kinematical theory of scattering. Our calculations show that the analysis of strains in multilayers performed using the sin²Ψ method may give misleading results and therefore should be accompanied by other methods.

• Wydawca: Institute of Electron Technology
• Czasopismo: Electron Technology
• Rocznik: 2000
• Tom: Vol. 33, No. 3
• Strony: 329--333
• Opis fizyczny: Bibliogr. 10 poz.

Twórcy

autor

Chocyk D.

autor

Gładyszewski G.

autor

Pienkos T.

autor

Gładyszewski L.

• Department of Experimental Physics, Technical University of Lublin, ul. Nadbystrzycka 38, 20-618 Lublin, Poland