3-D silicon micromachining for AFM/LFM microprobe development

• Autorzy: Grabiec P. , Domański K. , Dumania P. , Studzińska K. , Gotszalk T. , Rangelow I. W. , Sunyk R.
• Języki publikacji: EN

Abstrakty

EN

Results of work on the development of microprobes for the simultaneous Atomic/Lateral Force Measurements (AFM/LFM) are presented. AFM/LFM microprobes for surface characterization were modelled using FEM, designed and fabricated using 3-D silicon processing sequence. Finally microprobes were evaluated by using them for characterization of the test surfaces.

• Wydawca: Institute of Electron Technology
• Czasopismo: Electron Technology
• Rocznik: 2000
• Tom: Vol. 33, No. 4
• Strony: 577--591
• Opis fizyczny: Bibliogr. 7 poz

Twórcy

autor

Grabiec P.

autor

Domański K.

autor

Dumania P.

autor

Studzińska K.

autor

Gotszalk T.

autor

Rangelow I. W.

autor

Sunyk R.

• Institute of Electron Technology al. Lotników 32/46, 02-668 Warszawa, Poland