Thin SnO₂ films grown by RGTO method

• Autorzy: Żyłka P.
• Konferencja: International Seminar on Semiconductor Gas Sensors : SGS' 98 (1 ; 22-25.09.1998 ; Ustroń, Poland)
• Języki publikacji: EN

Abstrakty

EN

Rheotaxial Growth and Thermal Oxidation (RGTO) method was applied to produce polycrystalline thin films of SnO₂ chracterized by very high surface-to-volume ratios. Films of metallic tin having structure of unconnected microspheres were grown in the preliminary RGTO method stage by means of a vacuum thermal evaporation. Metal layers were then thermally oxidized in atmospheric air. This paper presents results of the work done in investigating the structure and electrical properties of the films as the possibility of utilising them in Liquid Petroleum Gas (LPG) sensing.

• Wydawca: Institute of Electron Technology
• Czasopismo: Electron Technology
• Rocznik: 2000
• Tom: Vol. 33, No. 1/2
• Strony: 82--85
• Opis fizyczny: Bibliogr. 7 poz.

Twórcy

autor

Żyłka P.

• Wrocław University of Technology, Institute of Electrotechnics and Electrotechnology Fundamentals, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland