Dispersion error of a beam splitter cube in white-light spectral interferometry

• Autorzy: Hlubina P. , Luňáček J. , Ciprian D. , Chlebus R.
• Języki publikacji: EN

Abstrakty

EN

We revealed that the phase function of a thin-film structure measured by a white-light spectral interferometric technique depends on the path length difference adjusted in a Michelson interferometer. This phenomenon is due to a dispersion error of a beam splitter cube, the effective thickness of which varies with the adjusted path length difference. A technique for eliminating the effect in measurement of the phase function is described. In a first step, the Michelson interferometer with same metallic mirrors is used to measure the effective thickness of the beam splitter cube as a function of the path length difference. In a second step, one of the mirrors of the interferometer is replaced by a thin-film structure and its phase function is measured for the same path length differences as those adjusted in the first step. In both steps, the phase is retrieved from the recorded spectral interferograms by using a windowed Fourier transform applied in the wavelength domain.

Słowa kluczowe

EN

spectral interferometry; white-light source; Michelson interferometer; beam splitter cube; dispersion; BK7 glass; phase retrieval; effective thickness

• Wydawca: Stowarzyszenie Elektryków Polskich ; Polska Akademia Nauk ; Wojskowa Akademia Techniczna im. Jarosława Dąbrowskiego
• Czasopismo: Opto-Electronics Review
• Rocznik: 2008
• Tom: Vol. 16, No. 4
• Strony: 439--443
• Opis fizyczny: Bibliogr. 19 poz., wykr.

Twórcy

autor

Hlubina P.

autor

Luňáček J.

autor

Ciprian D.

autor

Chlebus R.

• Department of Physics, Technical University Ostrava, 17 listopadu 15, 708 33 Ostrava-Poruba, Czech Republic,

Bibliografia

• 1. L.M. Smith and C.C. Dobson, “Absolute displacement measurement using modulation of the spectrum of white light in a Michelson interferometer”, Appl. Optics 28, 3339-3342 (1989).
• 2. U. Schnell, E. Zimmermann, and R. Dändliker, “Absolute distance measurement with synchronously sampled whitelight channelled spectrum interferometry”, J. Opt. A-Pure Appl. Op. 4, 643-651 (1995).
• 3. P. Hlubina, “Dispersive spectral-domain two-beam interference analysed by a fibre-optic spectrometer”, J. Mod. Opt. 51, 537-547 (2004).
• 4. J. Schwider and L. Zhou, “Dispersive interferometric profilometer”, Opt. Lett. 19, 995-997 (1994).
• 5. P. Sandoz, G. Tribillon, and H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferograms”, J. Mod. Opt. 43, 701-708 (1996).
• 6. A.F. Zuluaga and R. Richards-Kortum, “Spatially resolved spectral interferometry for determination of subsurface structure”, Opt. Lett. 24, 519-521 (1999).
• 7. D. Reolon, M. Jacquot, I. Verrier, G. Brun, and C. Veillas, “Broadband supercontinuum interferometer for high-resolution profilometry”, Opt. Express 14, 128-137 (2006).
• 8. U. Schnell, R. Dändliker, and S. Gray, “Dispersive whitelight interferometry for absolute distance measurement with dielectric multilayer systems on the target”, Opt. Lett. 21, 528-530 (1996).
• 9. Y. Liang and C.H. Grover, “Modified white-light Mach-Zehnder interferometer for direct group-delay measurements”, Appl. Optics 37, 4105-4111 (1998).
• 10. I. Gurov, P. Hlubina, and V. Chugunov, “Evaluation of spectral modulated interferograms using a Fourier transform and the iterative phase-locked loop method”, Meas. Sci. Technol. 14, 122-130 (2003).
• 11. P. Hlubina, D. Ciprian, J. Lunácek, and M. Lesnák, “Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film”, Opt. Express 14, 7678-7685 (2006).
• 12. D. Reolon, M. Jacquot, I. Verrier, G. Brun, and C. Veillas, “High resolution group refractive index measurement by broadband supercontinuum interferometry and wavelet-transform analysis”, Opt. Express 14, 12744-12750 (2006).
• 13. P. Hlubina, J. Lunácek, D. Ciprian, and R. Chlebus, “Windowed Fourier transform applied in the wavelength domain to process the spectral interference signals”, Opt. Commun. 281, 2349-2354 (2008).
• 14. K.B. Farr and N. George, “Beamsplitter cube for white light interferometry”, Opt. Eng. 31, 2191-2196 (1992).
• 15. A. Pfärtner and J. Schwider, “Dispersion error in white-light Linnik interferometers and its applications for evaluation procedures”, Appl. Opt. 34, 6223-6228 (2001).
• 16. P.D. Koudelka and J.H. Burge, “Fabrication of cube beamsplitter for white light interferometry”, Proc SPIE 5252, 17-25 (2004).
• 17. P. Hlubina, “White-light spectral interferometry to measure the effective thickness of optical elements of known dispersion”, Acta Phys. Slovaca 55, 387-393 (2005).
• 18. J.D. Plummer, M.D. Deal, and P.B. Griffin, Silicon VLSI Technology - Fundamentals, Practice and Modelling, Prentice Hall, Upper Saddle River, 2000.
• 19. Schott ComputerGlass Catalogue 1.0, Schott Glasswerke,Mainz, 1992.