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On Improving Performance of MEMS Accelerometers in Tilt Sensing

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Warianty tytułu
Konferencja
International Conference Computer Simulation in Machine Design - COSIM 2006 (11 ; 2006 ; Krynica Zdrój, Poland)
Języki publikacji
EN
Abstrakty
EN
The most significant methods of increasing accuracy of tilt measurements have been presented in the paper. The measurements referred to are to be performed under quasi-static conditions by means of miniature tilt sensors built of MEMS accelerometers. Some of the methods consist in modifications of the existing MEMS accelerometers, whereas the other can be useful while using other types of commercially available accelerometers, including those manufactured with application of conventional technologies.
Słowa kluczowe
Rocznik
Strony
37--47
Opis fizyczny
Bibliogr. 22 poz., il.
Twórcy
autor
Bibliografia
  • Acar, C., Shkel, A., 2003, Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers, J. Micromech. Microeng. 13, No 5, 634-645.
  • Beißner, S., Puppich, M., Bütefisch, S., Büttgenbach, S., Elbel, T., 2001, Analog Force Feedback Circuit for Capacitive Micromechanical Acceleration Sensors, in: Proc. 10. Int. Conf. Sensor, Nuremberg (Germany), 2, 577-582.
  • Brown, W. C., Miniature Crystal Ovens: Their Uses, Limitations, and Specifications, Application Note No 146-003, Isotemp Research Inc., Charlottesville (USA).
  • Bütefisch, S., Schoft, A., Büttgenbach, S., 2000, Three-Axes Monolithic Silicon Low-g Accelerometer, J. Microelectromech. Syst. 9, No 4, 551-556.
  • Dovica, M., Gorzás, M., Katuch, P., Kováč, J., Ondočko, Š., 2004, Mechatronic aspects of wired in-pipe passive smart bristle micromachine design, Elektronika, No 8-9, 167-169.
  • Gmiterko, A., Kelemen, M., Dovica, M., Capák, M., 1999, Miniature Mobile Robot for Moving in a Tube with Small Diameter, in: Proc. 2. Int. Conf. Mechatronics and Robotics '99, Brno, 67-70.
  • Horton, M., Kitchin, C., 1996, A Dual Axis Tilt Sensor Based on Micromachined Accelerometers, Sensors (Peterborough, Nh), 13, No 4, 91-94.
  • Lötters, J. C., Schipper, J., Veltink, P. H., Olthuis, W., Bergveld, P., 1998, Procedure for in-use calibration of triaxial accelerometers in medical applications, Sensors and Actuators A68, 22l-228.
  • Low Cost ±2g Dual Axis Accelerometer with Duty Cycle Output ADXL 202E, Analog Devices Inc., 2000, Norwood (USA).
  • Low Profile, Low Consumption ±0.5 g Dual Axis Accelerometer with Absolute Analog Outputs MXA6500E, MEMSIC Inc., 2003, North Andover (USA).
  • Łuczak, S., 2002, Standard MEMS Accelerometer as a Dual-Axis Tilt Sensor, in: Proc. 47. Internationales Wissenschaftliches Kolloquim, Ilmenau (Germany), 244-245.
  • Łuczak, S., 2004, Experimental Studies of Miniature Tilt Sensors, Elektronika, No 8-9, 215-218.
  • Łuczak, S., Oleksiuk, W., Bodnicki, M., 2006, Sensing Tilt with MEMS Accelerometers, IEEE Sensors J., 6, No 6, 1669-1675.
  • Łuczak, S., Oleksiuk, W., Increasing Accuracy of Tilt Measurements, Eng. Mech., to be published.
  • Madou, M., 1997, Fundamentals of Microfabrication, CRC Press, Boca Raton (USA), 145, 217-219, 316.
  • Oleksiuk, W., Czerwiec, W., Munerato, F., Mihalachi, D., Laurent, C., Nitu, C., Comeaga, C. D., 1999, Flexible Mini-Robot with Autonomous Motion, in: Proc. Conf. ICRAM'99, Istanbul (Turkey), 396-401.
  • Programmable Dual-Axis Inclinometer/Accelerometer ADIS 16201, Analog Devices Inc., 2006, Norwood (USA).
  • Reducing Accelerometer Temperature Drift with Crystal Ovens, Sensors, 1996, (Peterborough, Nh), 13, No 4, 92.
  • Sensors & Sensory Systems Catalog, 2006, Crossbow, San Jose (USA), 70-71.
  • Senturia, S. D., 2001, Microsystem Design, Kluwer Academic Publishers, Boston/Dordrecht/London, 515, 525.
  • Tilt Sensing with Kionix MEMS Accelerometers, AN-005, Kionix, 2005, Ithaca (USA).
  • Ultra Low Cost, ±1.0 g Dual Axis Accelerometer with Absolute Outputs MXA2500J/K, MEMSIC Inc., 2006, North Andover (USA).
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWA0-0026-0041
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