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Properties and origin of oval defects in epitaxial structures grown by molecular beam epitaxy

Wybrane pełne teksty z tego czasopisma
Identyfikatory
Warianty tytułu
Konferencja
Surface Physics and Thin-Films Structure Seminar ; 17-21.05.2005 ; Szklarska Poręba, Poland
Języki publikacji
EN
Abstrakty
EN
A class of macroscopic, so-called oval defects, which may be found in an epitaxial A3B5 materials grown by molecular beam epitaxy (MBE) technique, is studied in this paper. The investigations' were performed on the structures containing (Al)GaAs or InGaAs layers. The geometry, morphology as well as the optical properties of defects were studied by different experimental methods, like spatially resolved photoluminescence (SRPL), scanning electron microscopy (SEM) and cathodoluminescence (CL). The conclusions are drawn as to the sources of defects and conditions of their appearance.
Czasopismo
Rocznik
Strony
537--548
Opis fizyczny
Billiogr. 9 poz., il., wykr.
Twórcy
autor
  • Institute of Electron Technology, al. Lotniów 32/46, 02-668 Warszawa, Poland
autor
  • Institute of Electron Technology, al. Lotniów 32/46, 02-668 Warszawa, Poland
  • Institute of Electron Technology, al. Lotniów 32/46, 02-668 Warszawa, Poland
autor
  • Institute of Electron Technology, al. Lotniów 32/46, 02-668 Warszawa, Poland
autor
  • Institute of Electron Technology, al. Lotniów 32/46, 02-668 Warszawa, Poland
Bibliografia
  • [1] Chand N., Chu S.N.G., Comprehensive study and methods of elimination of oval defects in MBE-GaAs, Journal of Crystal Growth 104(2), 1990, pp. 485-97.
  • [2] Klima K., Kaniewska M., Reginski K., Kaniewski J., Oval defects in the MBE grown AlGaAs/InGaAs/GaAs andInGaAs/GaAsstructures, Crystal Research and Technology 34(5-6), 1999, pp. 683-7.
  • [3] Russell-Harriott J.J., Zou J., Moon A.R., Cockayne D.J.H., Usher B.F., Investigation of oval defects in InGaAs/GaAs strained-layer heterostructures using cathodoluminescence and wavelength dispersive spectroscopy, Applied Physics Letters 73(26), 1998, pp. 3899-901.
  • [4] Kawada H., Shirayone S., Takahashi K., Reduction of surface defects in GaAs layers grown by MBE, Journal of Crystal Growth 128(1-4), 1993, pp. 550-6.
  • [5] Matteson S., Shih H.D., Morphological studies of oval defects in GaAs epitaxial layers grown by molecular beam epitaxy, Applied Physics Letters 48(1), 1986, pp. 47-9.
  • [6] Chai Y.G., Chow R., Source and elimination of oval defects on GaAs films grown by molecular beam epitaxy, Applied Physics Letters 38(10), 1981, pp. 796-8.
  • [7] Shinohara M., Ito T., Thermodynamic study on the origin of oval defects in GaAs grown by molecular-beam epitaxy, Journal of Applied Physics 65(11), 1989, pp. 4260-7.
  • [8] Weng S.-L., Ga2^O3^: the origin of growth-induced oval defects in GaAs molecular beam epitaxy, Applied Physics Letters 49(6), 1986, pp. 345-7.
  • [9] Papadopoulo A.C., Alexandre F., Bresse J.F., Characterization of oval defects in molecular beam epitaxy Gag7Alg3As layers by spatially resolved cathodoluminescence, Applied Physics Letters 52(3), 1988,' pp. 224-6.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWA0-0006-0059
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