Application of interference methods for determination of curvature radius in metal-oxide-semiconductor (MOS) structures

• Autorzy: Rzodkiewicz W. , Borowicz L.
• Konferencja: Surface Physics and Thin-Films Structure Seminar ; 17-21.05.2005 ; Szklarska Poręba, Poland
• Języki publikacji: PL

Abstrakty

EN

The paper deals with the measurement of the radius of curvature of silicon wafer surface. The aim of these measurements was to determine stresses generated during oxidation of silicon wafers. A greater molar volume of SiO2 layer in relation to the substrate material causes changes in the shape of oxidized surface, which results in stresses in both silicon dioxide layer and silicon. These changes are detected by Fizeau interferometer. In order to find the local value of curvature radii, deformations of the wafers under investigation approximated by corresponding interpolation formulas have been determined.

Słowa kluczowe

EN

Si-SiO2 system; interferometry; radius of curvature; stress

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2005
• Tom: Vol. 35, nr 3
• Strony: 523--527
• Opis fizyczny: Billiogr. 5 poz., wykr.

Twórcy

autor

Rzodkiewicz W.

• Institute of Electron Technology, al. Lotnikow 32/46, 02-668 Warszawa, Poland

autor

Borowicz L.

• Institute of Electron Technology, al. Lotnikow 32/46, 02-668 Warszawa, Poland

Bibliografia

• [1] Briers J.D., Optical testing: a review and tutorial for optical engineers, Optics and Lasers in Engineering 32(2), 1999, pp. 111-38.
• [2] Illueca C., Vazquez C., Hernandez C., Viqueira V., The use of Newton's rings for characterising ophthalmic lenses, Ophthalmic and Physiological Optics 18(4), 1998, pp. 360-71.
• [3] Weisstein E.W., Radius of Curvature, http://mathworld.wolfram.com/RadiusofCurvature.html (MathWorld-A Wolfram Web Resource).
• [4] Klein C.A. , How accurate are Stoney's equation and recent modifications, Journal of Applied Physics 88(9), 2000, pp. 5487-9.
• [5] Ma T.P., EMIS Datareviews Series, No. 4, INSPEC 1987