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High resolution photoemission yield study of the GaAs(100) surface cleaned by atomic hydrogen

Wybrane pełne teksty z tego czasopisma
Identyfikatory
Warianty tytułu
Konferencja
Surface Physics and Thin-Films Structure Seminar ; 17-21.05.2005 ; Szklarska Poręba, Poland
Języki publikacji
EN
Abstrakty
EN
High-resolution photoemission yield spectroscopy (PYS) has been used to study the electronic properties of space charge layer of the real GaAs(100) surface cleaned by atomic hydrogen. The ionization energy, work function and interface Fermi level position were determined as a function of hydrogen dose. Moreover, the evolution of effective density of filled electronic states localized in the band gap and in the upper part of the valence band was observed. Our experiments showed that for the hydrogen dose up to 10 4 L H 2 the contamination etching stage occurs for which the interface Fermi level position E
Czasopismo
Rocznik
Strony
385--391
Opis fizyczny
Bibliogr. 23 poz., wykr.
Twórcy
  • Department of Microelectronics, Institute of Physics, Silesian University of Technology, Bolesława Krzywoustego 2, 44-100 Gliwice, Poland
  • Department of Microelectronics, Institute of Physics, Silesian University of Technology, Bolesława Krzywoustego 2, 44-100 Gliwice, Poland
autor
  • Department of Microelectronics, Institute of Physics, Silesian University of Technology, Bolesława Krzywoustego 2, 44-100 Gliwice, Poland
autor
  • Department of Microelectronics, Institute of Physics, Silesian University of Technology, Bolesława Krzywoustego 2, 44-100 Gliwice, Poland
Bibliografia
  • [1] Ranke w., Jacobi K., Structure and reactivity of GaAs surfaces, Progress in Surface Science 10(1), 1981, pp. 1-52.
  • [2] Ploog K., [In] Crystals: Growth Properties and Applications, H.C.Freyhardt [Ed.], Vol. 3, Spinger, Berlin, Heidelberg 1980, p. 73.
  • [3] Torkhov N.A., Formation of a native-oxhide structure on the surface of n-GaAs under natural oxidation in air, Semiconductors 37(10), 2003, pp. 1177-84.
  • [4] Thurmond C.D., Schwartz G.P., Kammlott G.W., Schwartz B., GaAs oxidation and the Ga-As-O equilibrium phase diagram, Journal of the Electrochemical Society 127(6), 1980, pp. 1366-71.
  • [5] Hou T., Greenlief C.M., Keller S.W., Nelen L., Kauffman J.F., Passivation of GaAs (100) with an adhesion promoting self-assembled monolayer, Chemistry of Materials 9(12), 1997, p. 3181.
  • [6] Bartels F., Monch W., On the growth mode of oxide films on cleaved GaAs(110) surfaces at room temperature, Solid State Communications 57(8), 1986, pp. 571-4.
  • [7] Chang R.P.H., Chang C.C., Darack S., Hydrogen plasma etching of semiconductors and their oxides, Journal of Vacuum Science and Technology 20(1), 1982, pp. 45-50.
  • [8] Petit E.J., Houzay F., Optimal surface cleaning of GaAs (001) with atomic hydrogen, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 12(2), 1994, pp. 547-50.
  • [9] Petit E.J., Houzay F., Moison J.M., Interaction of atomic hydrogen with native oxides on GaAs(100), Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films 10(4), 1992, pp. 2172-7.
  • [10] Losurdo M., Capezzuto P., Bruno G., Plasmasurface interactions in the processing of III-V semiconductor materials, Pure and Applied Chemistry 70(6), 1998, pp. 1181-6.
  • [11] SzuBER J., New procedure for determination of the interface Fermi level position for atomic hydrogen cleaned GaAs(100) surface usingphotoemission, Vacuum 57(2), 2000, pp. 209-17.
  • [12] Bolmont D., Chen P., Sebenne C.A., Proix F., Structural and electronic properties of cleaved Si(111) upon room-temperature form^ation of an interface with Ag, Physical Review B: Condensed Matter 24(8), 1981, pp. 4552-9.
  • [13] SuGAYA T., Kawabe M., Low-temperature cleaning of GaAs substrate by atomic hydrogen irradiation, Japanese Journal of Applied Physics, Part 2: Letters 30(3A), 1991, pp. L402-4.
  • [14] Veeco Application Note, 1 (1996).
  • [15] Girycki a., Szuber J., Atomic hydrogen gun for cleaning of GaAs surface, Electron Technology 31(3-4), 1998, pp. 495-8.
  • [16] Abidri B., Lacharme J.P., Ghamnia M., Sebenne C.A., Eddrief M., Zerrouki M., Effect of Cu deposition and annealing upon a GaSe/Si(111) heterojunction, Surface Review and Letters 6(6), 1999, pp. 1173-8.
  • [17] Kane E.O., Theory of photoelectric emission from semiconductors, Physical Review 127(1), 1962, pp. 131-41.
  • [18] Kampen T.U., Monch W., Hydrogen-induced variations of the ionization energy on GaAs(110) surfaces, Physical Review B: Condensed Matter 46(20), 1992, pp. 13309-12.
  • [19] Lebedev M.V., Aono M., Valence band photoemission, band bending, and ionization energy of GaAs(100) treated in alcoholic sulfide solution, Journal of Applied Physics 87( 1), 2000, pp. 289-94.
  • [20] Akatsu T., Plobl A., Stenzel H., Gosele U., GaAs wafer bonding by atomic hydrogen surface cleaning, Journal of Applied Physics 86(12), 1999, pp. 7146-50.
  • [21 ] Szuber J., Cleaning ofMBE GaAs substrates by novel techniques using surface chemical reactions with hydrogen, Electron Technology 29(2-3), 1996, pp. 182-5.
  • [22] Andriamanantensoa I., Lacharme J.P., Sebenne C.A., Effect of room-temperature adsorption of Sn on Si(100) surface properties. Surface Science 189-190, 1987, pp. 563-9.
  • [23] Spicer W.E., Lilientai-Weber Z., Weber E., Newman N., Kendelewicz T., Cao R., McCants C., Mahowald p., Miyano K., Lindau I., The advanced unified defect model for Schottky barrier formation, Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena 6(4), 1988, pp. 1245-51.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BWA0-0006-0037
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