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Electrically controllable capacitors for microelectronics
Języki publikacji
Abstrakty
Praca prezentuje aktualny stan wiedzy o stosowanych w mikroelektronice elektrycznie sterowanych zmiennych pojemnościach. Omawiana jest budowa i podstawowe charakterystyki trzech rodzajów takich pojemności: diodowych (złączowych), MEMS i BST na podstawie przeglądu publikacji naukowych z lat 1964-2004.
The paper concisely presents current state of knowledge of electrically controllable variable capacitors applied in microelectronics. Structure and basic characteristics of three types of such capacitors - diode's (junction's), MEMS's, and BST's - are described on basis of scientific publications in 1964-2004 years.
Wydawca
Rocznik
Tom
Strony
36--39
Opis fizyczny
Bibliogr. 32 poz., wykr.
Twórcy
autor
autor
- Politechnika Gdańska, Wydział Elektroniki, Telekomunikacji i Informatyki
Bibliografia
- [1] http://www.metelics.com/pdfiles/GaAs_Varactors_Brochure_5-9-03.pdf, 2005.
- [2] Klamka J.: Półprzewodnikowe diody o zmiennej pojemności. WNT, 1964.
- [3] http://www.metelics.com/pdfiles/B10B.pdf, 2005.
- [4] Wilamowski B. M.: Układy scalone - Budowa, działanie i technologia. WKiŁ, 1989.
- [5] H.-D. Wu i in.: Voltage Tunable Capacitors Using High Temperature Superconductors and Ferroelectrics. IEEE Trans. on Applied Superconductivity, Vol. 4, No. 3, 1994, pp. 156-160.
- [6] G. J. Allbutt, D. G. Nairn: Tunable capacitors for digital CMOS compatible high frequency analog filters. 1996 IEEE Int. Sym. on Circuits and Systems, Vol. 1, 1996, pp. 89-92.
- [7] Chang Liu: Micro electromechanical systems (MEMS): technology and future applications in circuits. Proc. of the 5th Int. Conf. on Solid-State and Integrated Circuit Technology, 1998, pp. 928-931.
- [8] Z. Feng i in.: Design and modeling of RF MEMS tunable capacitors using electro-thermal actuators. 1999 MTT-S IEEE Int. Microwave Sym. Digest, Vol. 4, 1999, pp. 1507-1510.
- [9] J.-B. Yoon, C. T.-C. Nguyen: A high-Q tunable micromechanical capacitor with movable dielectric for RF applications. IEEE Int. Electron Devices Meeting Digest, SF, USA, 2000, pp 489-492.
- [10] J. J. Yao i in.: A Low Power/Low Voltage Electrostatic Actuator for RF MEMS Applications: Solid State Sensors and Actuators Workshop Digest, SC, USA, 2000, pp. 246-249.
- [11] Z. Feng i in.: MEMS-based variable capacitor for millimeter-wave applications. Ibidem, pp. 255-258.
- [12] J.-C. Chiao: MEMS for High-Frequency Applications. SPIE 8th Annual Sym. on Smart Structures and Materials, Smart Electronics and MEMS, 2001.
- [13] J. Zou i in.: Development of a Wide-Tuning-Range Two-Parallel-Plate Tunable Capacitor for Integrated Wireless Communication Systems. Int. J. of RF and Microwave Computer Aided Engineering, Vol. 11, No. 5, 2001, pp. 322-329.
- [14] H. Nieminen i in.: Microelectromechanical capacitor with wide tuning range. IEE Electronics Letters, Vol. 37, No. 24, 2001, pp. 1451-1452.
- [15] K. Stadius i in.: Monolithic tunable capacitors for RF applications. 2001 IEEE Int. Sym. on Circuits and Systems, Vol. 1, 2001, pp. 488-491.
- [16] J. C. Chiou, Y. C. Lin: A novel capacitance control design of tunable capacitor using multiple electrostatic driving electrodes. Proc. of the 1st IEEE Conf. on Nanotechnology, 2001, pp. 319-324.
- [17] J. Y. Park i in.: Micromachined RF MEMS tunable capacitors using piezoelectric actuators. IEEE MTT-S Int. Microwave Sym. Digest, Vol. 3, 2001, pp. 2111-2114.
- [18] Yu Liu: MEMS and BST Technologies for Microwave Applications. Dr of Phil. Dis., University of California 2002.
- [19] Z. Xiao i in.: Micromachined variable capacitor with wide tuning range. Solid-State Sensors and Actuators Workshop Digest, SC, USA, 2002, pp. 346-349.
- [20] S. Seok i in.: A novel linearly tunable MEMS variable capacitor. J. Micromechanics Microengineering, Vol. 12, 2002, pp. 82-86.
- [21] G. V. Ionis i in.: Differential Multi-Finger MEMS Tunable Capacitors for RF Integrated Circuits. Proc. Int. Microwave Sym., 2002, pp. 345-348.
- [22] A. Tombak i in.: Tunable barium strontium titanate thin film capacitors for RF and microwave applications. IEEE Microwave and Wireless Components Letters, (także: IEEE Microwave and Guided Wave Letters), Vol. 12, No. 1, 2002, pp. 3-5.
- [23] F. F. Faheen i in.: Post-Enabled Precision Flip-Chip Assembly for Variable MEMS Capacitor. Intern. Microwave Sym. Digest, 2003, pp. 1927-1930.
- [24] D. Peroulis and L. P. B. Katehi: Electrically-Tunable Analog RF MEMS Varactors with Measured Capacitance Range of 300%. Ibidem, pp. 1793-1796.
- [25] B. Lakshminarayanan and T. Weller: Tunable Bandpass Filter Using distributed MEMS Transmission Lines. Ibidem, pp. 1789-1792.
- [26] A. Tombak i in.: Voltage Controlled RF Filters Employing Thin Film Barium Strontium Titanate Tunable Capacitors. IEEE Trans. on Microwave Theory and Techniques, Vol. 51, No. 2, 2003, pp. 462-467.
- [27] A. Oz, G. K. Fedder: CMOS-Compatible RF-MEMS Tunable Capacitors. 2003 IEEE MTT-S Int. Microwave Sym. Digest, Vol. 1, 2003, pp. A97-A100 (także: 2003 IEEE Radio Frequency Integrated Circuits Sym.).
- [28] (Ed.) Bhushan B.: Springer Handbook of Nanotechnology. Springer-Verlag Berlin Heidelberg, 2004.
- [29] H. D. Nguyen i in.: Angular vertical comb-driven tunable capacitor with high-tuning capabilities. J. of Microelectromechanical Systems, Vol. 13, No. 3, 2004, pp. 406-413.
- [30] S. O. Choi i in.: A tunable capacitor using an immiscible bifluidic dielectric. 2004 IEEE MTT-S Int. Microwave Sym. Digest, Vol. 2, 2004, pp. 873-876.
- [31] C. H. Lai i in.: A tunable and program-erasable capacitor on Si with excellent tuning memory. IEEE Radio Frequency Integrated Circuits Sym. Digest, 2004, pp. 259-262.
- [32] He Siyuan, R. M. Ben: A novel MEMS tunable capacitor. Proc. of the 2004 Int. Conf. on MEMS, NANO and Smart Systems, 2004, pp. 550-554.
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Bibliografia
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