Methane cracking and secondary hydrocarbon generation in inductively coupled RF plasmas

• Autorzy: Tabarés F. L. , Alegre D. , Mozetič M. , Vesel A.
• Konferencja: International Conference on Research and Applications of Plasmas, Plasma-2011, 12-16 September 2011, Warsaw, Poland
• Języki publikacji: EN

Abstrakty

EN

Pure methane plasmas have been produced in an inductively coupled radio frequency (ICRF) reactor with quartz walls in the absence of carbon film deposition. A differentially pumped mass spectrometer was used for the recording of the secondary hydrocarbon species produced in the reactor. The functional dependences of these species with plasma parameters has been analyzed and tentative mechanisms for their formation have been formulated. High power per molecule ratio promotes methane decomposition and acetylene formation.

Słowa kluczowe

EN

plasma; RF discharges; hydrocarbon cracking; methane reforming; plasma-assisted chemical vapour deposition (PACVD); carbon films

• Wydawca: Institute of Nuclear Chemistry and Technology
• Czasopismo: Nukleonika
• Rocznik: 2012
• Tom: Vol. 57, No. 2
• Strony: 287--290
• Opis fizyczny: Bibliogr. 6 poz., rys.

Twórcy

autor

Tabarés F. L.

autor

Alegre D.

autor

Mozetič M.

autor

Vesel A.

• Laboratorio Nacional de Fusion, Centro de Investigaciones Energéticas, Medioambientales y Tecnológicas (CIEMAT), 22 Avda Complutense, E-28404 Madrid, Spain, Tel.: [phone], Fax: [phone],

Bibliografia

• 1. Davis JW, Haasz AA, Stangeb JP (1988) Hydrocarbon formation due to combined H+ ion and H0 atom impact on pyrolytic graphite. J Nucl Mater 155/157:234–240
• 2. Silva SRP (ed) (2003) Properties of amorphous carbon. INSPEC, London
• 3. Tabarés FL, Ferreira JA, Ramos A et al. (2010) Suppression of tritium retention in remote areas of ITER by nonperturbative reactive gas injection. Phys Rev Lett 105:175006
• 4. Tabarés FL, Ferreira JA, Tafalla D (2007) On the mechanism of nitrogenated carbon film deposition by PACCVD in the presence of nitrogen. A cryo-trapping assisted mass spectrometric study. Chem Vapor Depos 13:335–344
• 5. Yamada R (1990) Enhancement of C2H2 formation due to interaction of graphite with energetic protons. J Nucl Mater 174:118–120
• 6.Zaplotnik R, Vesel A, Mozetic M (2011) Transition from E to H mode in inductively coupled oxygen plasma: hysteresis and the behaviour of oxygen atom density. Europhys Lett 95:55001-5