Quintet-gated FEA to form crossover beam

• Autorzy: Tagami T. , Takeda M. , Horie S. , Yoshida T. , Nagao M. , Neo Y. , Aoki T. , Mimura H. , Kanemaru S.
• Konferencja: 8th International Conference on Global Research and Education – Inter-Academia 2009
• Języki publikacji: EN

Abstrakty

EN

In this report, we have described about new field emission array (FEA) structure built-in micro-column. This newly proposed FEA has multi-gated structured and is designed to form a crossover. We had already demonstrated the quad- and quintet- gated FEA. A crossover formation by was successfully observed for the first time. by the quintetgated FEA Furthermore electron beam lithography was demonstrated.

Słowa kluczowe

EN

FEA; beam

• Wydawca: Łukasiewicz Industrial Research Institute for Automation and Measurements PIAP
• Czasopismo: Journal of Automation Mobile Robotics and Intelligent Systems
• Rocznik: 2009
• Tom: Vol. 3, No. 4
• Strony: 157--158
• Opis fizyczny: Bibliogr. 4 poz., rys.

Twórcy

autor

Tagami T.

autor

Takeda M.

autor

Horie S.

autor

Yoshida T.

autor

Nagao M.

autor

Neo Y.

autor

Aoki T.

autor

Mimura H.

autor

Kanemaru S.

• Research Institute of Electronics, Shizuoka, University, 3-5-1 Johoku, Nakaku, Hamamatsu, Shizuoka 432-8011, Japan. Tel/Fax: [phone],

Bibliografia

• [1] Soda T., Nagao M., Kanemaru S., Neo Y., Aoki T., Mimura H., JJAP, vol. 47, no. 6, 2008, pp. 5252-5255.
• [2] Neo Y., Takeda M., Soda T., Nagao M., Yoshida T., Kanemaru S., Sakai T., Hagiwara K., Saito N., Aoki T., Mimura H., J. Vac. Sci. Technol. B,vol. 27, issue 2, pp. 701-704.
• [3] Neo Y., Soda T., Nagao M., Yoshida T., Aoki T., Mimura H., Appl. Phys. Express, no. 1, 2008, 053001.
• [4] Nagao M., Yoshida T., Kanemaru S., Neo Y., Mimura H., Jpn. J. Appl. Phys., no. 48, 2009, 06FK02 (4 pages).