Tytuł artykułu
Autorzy
Treść / Zawartość
Pełne teksty:
Identyfikatory
Warianty tytułu
Konferencja
8th International Conference on Global Research and Education – Inter-Academia 2009
Języki publikacji
Abstrakty
ZnO films were grown by plasma-assisted metal organic vapor phase epitaxy (PA-MOVPE) using dimethylzinc (DMZn) and N O gases. The crystallinity and surface morphology of ZnO films were investigated using X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. The crystallinity of ZnO improved (a) when the N2O flow rate was increased, because vapor phase reaction was suppressed while surface migration was enhanced, and (b) when the growth temperature was increased, because surface diffusion was enhanced. In the PA-MOVPE method with N2O gases and DMZn, both the N2O flow rate and crystal growth temperature strongly affected the crystallinity of ZnO films.
Słowa kluczowe
Rocznik
Tom
Strony
124--126
Opis fizyczny
Bibliogr. 9 poz., rys.
Twórcy
autor
autor
autor
autor
- Department of Electrical and Electronic Engineering, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku Naka-ku Hamamatsu, 432-8561, Japan, ttnakan@ipc.shizuoka.ac.jp
Bibliografia
- [1] Nakamura S., Mukai T., Senoh M. Iwasa N.,Journal of Applied Physics , no. 76, 1994, 8189.
- [2] Tang Z.K., Wang G.K.L., Yu P., Appl. Phys. Lett., no. 72, 1998, 3270.
- [3] Krupanidhi S.B., Sayer M., J. Appl. Phys., no. 56, 1984, 3308.
- [4] Zhamg D.H., Brodie D.E., Thin Solid Films, no. 238,1994, 95.
- [5] Fujimoto E., Sumiya M., Ohnishi T., Watanabe K., Lippmaa M., Matsumoto Y., Koinuma H.,Appl. Phys. Express , no. 2, 2009, 045502.
- [6] Minegishi K., Koiwai Y., Kikuchi Y., Yano K., Kasuga M., Shimizu A., Jpn. J. Appl. Phys., no. 36, 1997, p. 1453 f.
- [7] Segawa Y., Ohtomo A., M. Koinuma M., Z.K. Tang, P. Yu, and GK.L. Wong,Phys. Stat. Sol. B , no. 202, (1997) 669.
- [8] Ryu Y.R., Zhu S., Budai J.D., Chandrasekhar H.R., Miceli P.F., White H.W., Appl. Phys. Lett., no. 88, 2000, p. 20 f.
- [9] Tsukazaki A., Onuma T., Ohtani M., Makino S., Sumiya M., Ohtani K., Chichibu S.F., Fuke S., Segawa Y., Ohno H., Koinuma H., Kawasaki M.,Nature Material, no. 4, 2004, 42.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BUJ7-0006-0036