ZnO films: propeties determined by electronic microscopy and ellipsometry

• Autorzy: Rakov M. , Poperenko L. , Tkach V. , Yurgelevich I.
• Konferencja: 8th International Conference on Global Research and Education – Inter-Academia 2009
• Języki publikacji: EN

Abstrakty

EN

Zinc oxide is a good material for application in nanoand optoelectronics due to its notable features, for example, large band gap. In this work ZnO films deposited by reactive magnetron sputtering at various pressure of residual gases and different temperatures of the substrate are investigated. The spectral dependences of ellipsometric parameters and of the films are determined by ellipsometry. The effective values of optical constants and are calculated. The roughness and the texture of the surfaces are obtained by Atomic-Force Microscopy (AFM) and Scanning Electronic Microscopy (SEM). One indicates that the refractive index decreases when reducing the pressure of residual gases, and the roughness decreases when elevating the temperature of the substrate. Thus, the behavior of some properties of the films at various conditions of deposition is determined.

Słowa kluczowe

EN

reactive magnetron sputtering; Beattie’s method; semi-infinite medium; AFM; SEM; nanostructures

• Wydawca: Łukasiewicz Industrial Research Institute for Automation and Measurements PIAP
• Czasopismo: Journal of Automation Mobile Robotics and Intelligent Systems
• Rocznik: 2009
• Tom: Vol. 3, No. 4
• Strony: 112--114
• Opis fizyczny: Bibliogr. 3 poz., rys.

Twórcy

autor

Rakov M.

autor

Poperenko L.

autor

Tkach V.

autor

Yurgelevich I.

• Taras Shevchenko National University of Kyiv, Department of Physics, Kyiv, 03022, Ukraine,

Bibliografia

• [1] Ellmer K., Klein A., Rech B.,Transparent conductive zinc oxide: Basics And Applications In Thin Film Solar Cells ,Springer: Berlin, 2008.
• [2] Borbat A.M., Gorban I.S., Okhrimenko B.A., Subbota-Melnik P.A., Shaikevich I.A., Shishlovskii A.A.,Optical measurements, Tekhnika: Kiev, 1967.
• [3] Rzhanov, K.K. Svitashev, A.I. Semenenko, V.K. Sokolov,Basic of ellipsometry , Nauka: Novosibirsk, 1979.