Fabrication of photonic crystal structures by laser lithography

• Autorzy: Mizeikis V. , Seet K. K. , Juodkazis S. , Misawa H.
• Konferencja: 8th International Conference on Global Research and Education – Inter-Academia 2009
• Języki publikacji: EN

Abstrakty

EN

Using femtosecond laser lithography technique, we have fabricated 3D PhC structures having woodpile and spiral architectures in photoresists, and investigated their photonic properties. The fabricated structures exhibit good structural quality, evidenced by long-range periodicity and absence of deformations, and photonic stop-gaps at nearinfrared and infrared wavelengths, evidenced by spectral bands of high reflectivity. These structures can be used as templates for further enhancement by infiltration of metals or high refractive index materials, such as Si.

Słowa kluczowe

EN

photonic crystals; laser lithography

• Wydawca: Łukasiewicz Industrial Research Institute for Automation and Measurements PIAP
• Czasopismo: Journal of Automation Mobile Robotics and Intelligent Systems
• Rocznik: 2009
• Tom: Vol. 3, No. 4
• Strony: 99--101
• Opis fizyczny: Bibliogr. 10 poz., rys.

Twórcy

autor

Mizeikis V.

autor

Seet K. K.

autor

Juodkazis S.

autor

Misawa H.

• Division of Global Research Leaders (Research Institute of Electronics), Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan. Tel/Fax: +(81)-53-478-1312,

Bibliografia

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• [3] Joannopoulos J.D., Johnson S.G., Winn J.N., Meade R.D.,Photonic Crystals: Molding the Flow of Light, Princeton University Press, 2008, p. 286.
• [4] 3D Laser Microfabrication, Principles and Applications, edited by H. Misawa and S. Juodkazis, Willey-VCH, 2007, p. 390.
• [5] http://www.microchem.com/products/su_eight.htm
• [6] Witzgall G., Vrijen R., Yablonovitch E., Doan V., Schwartz B., “Single-shot two-photon exposure of commercial photoresist for the production of three-dimensional structures”,Opt. Lett., vol. 23, 1998, pp.1745 -1747.
• [7] Mizeikis V., Seet K.K., Juodkazis S., Misawa H., “Threedimensional woodpile photonic crystal templates for infrared spectral range”, Opt. Lett., vol. 29, 2004, pp. 2061-2063.
• [8] Seet K.K., Mizeikis V., Matsuo S., Juodkazis S., Misawa H., „Three-dimensional spiral - architecture photonic crystals obtained by direct laser writing”,Adv. Mat., vol. 17, 2005 pp. 541 545.
• [9] Ho K., Chan C., Sokoulis C., Biswas R., Sigalas M., “Photonic band gaps in three dimensions: New layer-bylayer periodic structures”,Solid State Commun., no. 89, 1994, pp. 413-416.
• [10] Toader O., John S., “Proposed square spiral microfabrication architecture for large three-dimensional photonic band gap crystals”, Science, no. 292, 2001, pp. 1133-1135.