Effect of substrate temperature on the crystal properties of LiMn2O4 films prepared by RF magnetron sputtering

• Autorzy: Isai M. , Nakamura K. , Hosokawa T. , Izumichi T. , Sekikawa S.
• Konferencja: 8th International Conference on Global Research and Education – Inter-Academia 2009
• Języki publikacji: EN

Abstrakty

EN

The LiMn2O4 films for Li secondary batteries have been prepared by a RF magnetron sputtering method. The LiMn2O4 powder was used as a target material. The deposition rate, XRD, and surface morphology were investigated as a function of substrate temperature (Tsub). It was found that the deposition rate had a peak at around the of 200 °C. This research was also designed for preventing the target material being oxidized during the reactive sputtering process. A quartz tube was inserted between shutter and target. It seems that the quartz tube is effective to prevent oxidation of target material.

Słowa kluczowe

EN

LiMn2O4 thin film; RF magnetron sputtering; Li secondary batteries

• Wydawca: Łukasiewicz Industrial Research Institute for Automation and Measurements PIAP
• Czasopismo: Journal of Automation Mobile Robotics and Intelligent Systems
• Rocznik: 2009
• Tom: Vol. 3, No. 4
• Strony: 65--68
• Opis fizyczny: Bibliogr. 26 poz., rys.

Twórcy

autor

Isai M.

autor

Nakamura K.

autor

Hosokawa T.

autor

Izumichi T.

autor

Sekikawa S.

• Faculty of Engineering, Shizuoka University, Graduate School of Engineering, Shizuoka University 3-5-1 Johoku, Naka, Hamamatsu, Japan 432-8561,

Bibliografia

• [1] Desilvestro J., Haas O., “Metal oxide cathode materials for electrochemical energy storage: A Review”,J. Electrochem. Soc., vol. 137, 5C ,1990.
• [2] Koksbang R., Barker J., Shi H., Saidi M.Y., “Cathode materials for lithium rocking chair batteries”,Solid State Ionics , vol. 84, issue 1,1996.
• [3] Thackeray M.M., de Kock A., Rossouw M.H., Liles D., Bittihn R., Hoge D., “Spinel electrodes for the Li-Mn-O system for rechargeable lithium batteries”,J. Electrochem. Soc., vol. 139, 1992, p. 363 f.
• [4] Gummow R.J., de Kock A., Thackeray M.M., “Improved capacity retention in rechargeable 4V lithium/lithium manganese oxide (spinel) cells”, Solid State Ionics, vol. 69, issue 59 ,1994.
• [5] Hunter J.C., “Preparation of a new crystal form of manganese dioxides: -MnO ”, J. Solid State. Chem., vol. 39, 1981, p. 142 f.
• [6] Thackeray M.M., Johnson P.J., de Picciotto L.A., Bruce P.G., Goodenough J.B. “Electrochemical extraction of lithium from LiMn O ”, Mat. Res. Bull., vol. 19, no. 19,1984, pp. 179 f.
• [7] Thackeray M.M., David W.I.F., Bruce P.G., Goodenough J.B., “Lithium insertion into manganese spinels”,Mater. Res. Bull., vol.18, 1983, p. 461 f.
• [8] David W.I.F., Thackeray M.M., De Picciotto L.A., Goodenough J.B., “Structure refinement of the spinel-related phases Li2 Mn4 O4 and Li 0.2 Mn2 O4 ”, J. Solid State Chem.,vol. 67, 1987, p. 316 f.
• [9] Xia Y., Yoshio M., ”An investigation of lithium ion insertion into spinel structure Li-Mn-O compouds”,J. Electrochem. Soc.., vol. 143, 1996, p. 825 f.
• [10] Bando Y., Horii S., Tanaka T., “Reactive condensation and magnetic properties of ion oxide films”, Jpn. J. Appl. Phys., vol. 17, 1978, 1037 f.
• [11] Striebel K.A., Deng C.Z., Wen S.J., Cairns E.J., “Electrochemical behavior of LiMn O and LiCoO thin films produced with pulsed laser deposition”, J. Electrochem. Soc., vol. 143, 1996, p. 1821 f.
• [12] Shokoohi F.K., Tarascon J.M., Wilkens B.J., Guyomard D., Chang C.C., “Low temperature LiMn O spinel films for secondary lithium batteries”, J. Electrochem. Soc., vol. 139, 1992, p. 1845 f.
• [13] Rougier A., Striebel K.A., Wen S.J., Cairns E.J., “Cyclic voltammetry of pulsed laser deposited Li Mn O thin films”, J. Electrochem. Soc, vol. 145, 1998, p. 2975 f.
• [14] Liu P., Zhang J.G., Turner J.A., Tracy C.E., Benson D.K., “Lithium-manganese-oxide thin-film cathodes prepared by plasma-enhanced chemical vapor deposition”,J. Electrochem. Soc., vol. 146, 1999, p. 2001 f.
• [15] Isai M., Yamaguchi K., Iyoda H., Fujiyasu H., Ito Y., “Oxygen gettering effect during the reactive evaporation of manganese films”, J. Mater. Res., vol. 14, 1999, p. 1653 f.
• [16] Isai M., Ichikawa H., Shimada T., Morimoto K., Fujiyasu H., Ito Y., “Priority of the Mn deposition rate in the reactive evaporation conditions”, Jpn. J. Appl. Phys., vol. 39, 2000, p. 6676 f.
• [17] Isai M., Ichikawa H., Takahashi H., Fujiyasu H., Ito Y., “An idea of overcoming the oxidation of Mn metal in the crucible during the reactive evaporation process”,Electrochemistry, vol. 68, 2000, p. 963 f.
• [18] Isai M., Shimada T., Matsui T., Fujiyasu H., “A new technique keeping off the Mn evaporant from oxygen atmosphere during the reactive evaporation process”, Jpn. J. Appl. Phys., vol. 40, 2001 , p. 5069 f.
• [19] Isai M., Fujiyasu H., “Prevention against oxidation of Mn evaporant during reactive evaporation process”,Jpn. J. Appl. Phys., vol. 40, 2001, p. 6552 f.
• [20] Isai M., Nagashio Y., Tatei T., Fujiyasu H., “Stabilization of deposition rate of Mn oxide films by using SUS cell”,Trans. Mater. Res. Soc. Jpn., vol. 30, 2005, p. 1031 f.
• [21] Isai M. “Research on reactively evaporated Mn oxide films”, Trans. Mater. Res. Soc. Jpn., vol. 31, 2006, p. 1025 f.
• [22] Isai M., “Preparation of manganese oxide films for Li secondary batteries”, Trans. Mater. Res. Soc. Jpn., vol. 31, 2006, p. 1037 f.
• [23] Isai M., Chonan Y., Tojo Y., “Preparation of lithium manganese oxide films for Li secondary batteries”,Trans. Mater. Res. Soc. Jpn., vol. 32, 2007, p. 1203 f.
• [24] Isai M., Chonan Y., Tojo Y., “Preparation of lithium manganese oxide films for Li secondary batteries”,Trans. Mater. Res. Soc. Jpn., vol. 33, 2009, p. 1313 f.
• [25] Hosokawa T., Nakamura K., Hosoe S., Sakai S., Isai M. “Effect of doughnut-type plate on crystal properties of LiMn O films prepared by RF magnetron sputtering”. In:7th Int. Na. Con. on Glob. Res. and Edu. In New Methods in Edu ., 15th -18th September 2008, Pecs, Hungary, p. 392 f.
• [26] Isai M., Nakamura K., Hosokawa T., Sakai S., Hosoe S. “Preparation of LiMn O films by RF magnetron sputtering method”, , vol. 34,Trans. Mater. Res. Soc. Jpn. 2009, p. 355f.