Ion Implanted Substrates for Saw Gas Sensor

• Autorzy: Pasternak M. , Jasek K.
• Języki publikacji: EN

Abstrakty

EN

An approach to fundamental properties analysis of high frequency surface acoustic wave (SAW) gas sensors basing on an ion implanted substrate has been described in the paper. The results of analytical calculation shows a practical significance of the composite for high frequency SAW sensors technology.

• Wydawca: Silesian Division of Polish Acoustical Society
• Czasopismo: Molecular and Quantum Acoustics
• Rocznik: 2006
• Tom: Vol. 27
• Strony: 201--205
• Opis fizyczny: Bibliogr. 6 poz., rys.

Twórcy

autor

Pasternak M.

autor

Jasek K.

• Institute of Radioelectronic, Military University of Technology, 00-490 Warsaw,Poland2

Bibliografia

• 1.J. Kapelewski, M. Pasternak, Quasi-composite near-surface microstructured layers: modeling and dynamical properties, Composite Interfaces 3, 5/6, 1996.
• 2.B. A. Auld, Acoustic fields and waves in solids, 2nd ed., Kreiger, 1990.
• 3.Y. Yamada, Lattice instability and structural phase transitions in coupled systems, Elsevier, 1984.
• 4.S. J. Martin, G. C. Frye, S. D. Senturia, Dynamics and response of polymer-coated surface acoustic wave devices: effects of viscielastic properties and film resonance, Anal. Chem., 66, 1994.
• 5.M. G. Cottam, A. A. Maradudin, Surface Excitations, Elsevier 1994.
• 6.M. Pasternak, Some 0-2 type composite application for SAW sensors, 34thWinter School on Wave and Quantum Acoustic, 2005.