Investigations of Thin Film of Titanium Dioxide (Tio2)in a Surface Acoustic Wave Gas Sensor System

• Autorzy: Jakubik W.
• Języki publikacji: EN

Abstrakty

EN

A single thin film sensor structure of TiO2(~60nm) , has been studied for gas-sensing application at ~300C and ~400C. The sensor structures were obtained by RF sputtering technology from titanium target in a controlled atmosphere Ar:O2(3:1) in a vacuum 2x10-3mbar onto a LiNbO3 substrate (Y- cut Z-propagating) and glass substrate. The first structure was prepared making use the Surface Acoustic Wave method and the second - ( prepared in this same technological processes) onto a glass substrate with a planar microelectrode array is for simultaneously monitoring of the planar resistance of the structure. In the case of a SAW structure a very good results have been observed to ammonia gas - frequency are on the level of 300 Hz to 1500ppm of ammonia concentration in dry air. In the case of a hydrogen gas almost no frequency shift is observed, whereas to H2S gas the sensor response is not reversible. In all the measurements the electrical resistance of the TiO2was on the almost constant level - indicating only mass interactions.

Słowa kluczowe

EN

titanium dioxide; surface acoustic wave; gas sensors

• Wydawca: Silesian Division of Polish Acoustical Society
• Czasopismo: Molecular and Quantum Acoustics
• Rocznik: 2006
• Tom: Vol. 27
• Strony: 133--139
• Opis fizyczny: Bibliogr. 13 poz., rys.

Twórcy

autor

Jakubik W.

• Institute of Physics, Silesian Technical University,ul.Krzywoustego 2, 44-100 Gliwice, Poland,

Bibliografia

• 1.M.Vellekoop, Ultrasonics 36, 7,(1998).
• 2.A. D'Amico, A.Palma, E.Verona, IEEE Ultrasonics Symposium,1, 308,(1982).
• 3.L.J. LeGore, K.Snow, J,D.Galipeau, J.F.Vetelino, Sensors and Actuators B 35\36164 (1996).
• 4.A.L. Micheli, Am. Ceram. Soc. Bull. 63, 694, (1984).
• 5.S.A. Akbar, L.B. Younkman, J.Electrochem. Soc. 144, 1750 (1980).
• 6.L.A. Harris, J.Electrochem. Soc.127, 2657 (1980)
• 7.N.Bonini, M.C. Carotta, A.Chiorino, V.Guidi, C.Malagu, G.Martinelli, Sensors and Actuators B. Chem. 68, 274 (2000).
• 8.P.M.Faia, C.S. Furtado, A.J. Ferreira, Sensors and Actuators B. Chem. 101, 183 (2004)
• 9.E.Comini, G.Sberveglieri, M.Ferroni, V.Guidi, G. Martinelli, Sensors and Actuators B. Chem. 93, 409 (2003).
• 10.A.Teleki, S.E. Pratsinis, K. Kalyanasundaram, P.I. Gouma, Sensors and Actuators B. Chem. 119, 683 (2006).
• 11.W.Jakubik, M.Urbańczyk, A.Opilski, Ultrasonics, 39, 227 (2001).
• 12.A. D'Amico and E.Verona, Sensors and Actuators, 17,55 (1989).
• 13.H.Wohltjen, W.R. Barger, A.Snow, L.Jarvis, IEEE Transactions on Electron Devices, ED-,1170 (1985).