Application of SU8 Polymer in Waveguide Interferometer Ammonia Sensor

• Autorzy: Bednorz M. , Urbańczyk M. , Pustelny T. , Piotrowska A. , Papis E. , Sidor Z. , Kamińska E.
• Języki publikacji: EN

Abstrakty

EN

The deposition possibility of the polymer based waveguides in low cost and relatively simple and repeatable process is presented in experimental results. The waveguide can be easily formed into Mach-Zehnder interferometer by photolithography. The numerical analysis using the beam propagation method yields very promising results of sensor interaction with ammonia. The aim of future work will be to deposit the desired interferometer and compare the efficiency of the sensor with computer analysis.

• Wydawca: Silesian Division of Polish Acoustical Society
• Czasopismo: Molecular and Quantum Acoustics
• Rocznik: 2006
• Tom: Vol. 27
• Strony: 31--40
• Opis fizyczny: Bibliogr. 5 poz., rys.

Twórcy

autor

Bednorz M.

autor

Urbańczyk M.

autor

Pustelny T.

autor

Piotrowska A.

autor

Papis E.

autor

Sidor Z.

autor

Kamińska E.

• Silesian University of Technology, Institute of Physics, Department of Optoelectronics ul. Krzywoustego 2, 44-100 Gliwice, Poland

Bibliografia

• 1.B. Beche, N. Pelletier, E. Gaviot , J. Zyss, Single-mode TE00-TM00 optical waveguides on SU-8 polymer, Optics Communications, 230, 91-94, (2004).
• 2.Polymeric optical waveguides using direct ultraviolet photolithography process, Applied Physics A, 80, Issue: 3, February 2005, pp. 621 - 626 Tung, K.K.; Wong, W.H.; Pun, E.Y.B.
• 3.Ansel Y. et al, Optical waveguide device realised using two SU8 layers, Proc Optical MEMS (2002)
• 4.B.Y. Shewa, C.H. Kuo, Y.C. Huangb, Y.H. Tsai, UV-LIGA interferometer biosensor based on the SU-8 optical waveguide, Optics Communications, 230, 91-94, (2004).
• 5.M. Bednorz, A. Stolarczyk, E. Maciak, T. Pustelny, Z. Opilski, M. Urbańczyk, Influence of humidity variations on performance of Nafion® based ammonia optical sensor, Journal de Physique IV, 137, 23-29, (2006).