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Surface Acousic Wave Sensor for Hydrogen Detection with a Two-Layered Structure

Identyfikatory
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
Result concerning a hydrogen sensor based on a two-layer structure in a Surface Acousic Wave dual-delay line sustem are presented. The sensor material consist of two layeds performed in two different vapor deposition processes. The first one is a 720nm CuPc (or 110nm H2Pc) layer, the other one - a 20 nm thin palladium film. This structure was formed in a one of the dual-delay line system on a LiNbO3 Y-cut Z-propagation substrate. In such a multilayer structure can detect hydrogen in a medium concentration range (from 0.25% to 3% in nitrogen), even at room temperature. The sensor has a very good sensitivity, stability and is entirely reversible. The responce and recovery times are very short (-200s 0 800s), which is very important from the practical point fo view.
Słowa kluczowe
Rocznik
Tom
Strony
123--131
Opis fizyczny
Bibliogr. 11 poz., rys.
Twórcy
autor
  • Institute of Physics, Silesian University of Technology Bolesława Krzywoustego 2, 44-100 Gliwice, Poland
  • Institute of Physics, Silesian University of Technology Bolesława Krzywoustego 2, 44-100 Gliwice, Poland
autor
  • Institute of Physics, Silesian University of Technology Bolesława Krzywoustego 2, 44-100 Gliwice, Poland
autor
  • Institute of Physics, Silesian University of Technology Bolesława Krzywoustego 2, 44-100 Gliwice, Poland
Bibliografia
  • 1. C. Christofides, A.Mandelis, "Solid-state sensors for trace hydrogen gas detection", J. Appl. Phys. 68 (6), pp. R1-R30, 1990.
  • 2. A. D’Amico, A.Palma, E.Verona, "Hydrogen sensor using a palladium coated surface acoustic wave delay-line ", IEEE Ultrasonics Symposium, pp.308-311, 1982.
  • 3. M. Tabib-Azar, B. Sutapun, R.Petrick, A.Kazemi, "Highly sensitive hydrogen sensors using palladium coated fiber optics with exposed cores and evanescent field interactions", Sensors and Actuators B 56 pp. 158-163, 1999.
  • 4. A.Katsuki, K.Fukui, "H2 selective gas sensor based on SnCh", Sensors and Actuators, B 52 pp.30-37, 1998.
  • 5. A. D’Amico and E.Verona, "SAW sensors", Sensors and Actuators, 17, pp.55-66 ,1989.
  • 6. Schickfus M. von, Stanzel R„ Kammereck T., Weiskat D. and Dittrich W.," Improving the SAW gas sensor: device, electronics and sensor layer", Sensors and Actuators B, 18-19, pp.443 - 447, 1994.
  • 7. W.Jakubik, M.Urbańczyk, A.Opilski, "Sensor properties of PbPc in a SAW system", Ultrasonics, 39, pp.227-232, 2001.
  • 8. W. Jakubik, M. Urbańczyk, The electrical and mass effect in gas sensors of the SAW type, Journal of Technical Physics, 38, (3), 589-595 (1997).
  • 9. V.I.Anisimkin, I.M.Kotelyanskii, P.Verardi, E.Verona, "Elastic properties of thin-film palladium for surface acoustic wave sensors", Sensors and Actuators, B 23, 203-208, 1995.
  • 10. M. Urbańczyk, W. Jakubik, S. Kochowski, "Investigation of sensor properties of copper phthalocyanine with the use of surface acoustic waves", Sensors and Actuators, B 22, pp. 133- 137, 1994.
  • 11. L. J. LeGore, K.Snow, J,D.Galipeau, J.F.Vetelino, "The optimization of a tungsten tioxide film for application in a surface acoustic wave gas sensor", Sensors and Actuators B 35- 36, pp. 164-169, 1996.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BUJ6-0008-0104
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