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Electrode erosion mechanism in the rod plasma injector type of generator as deduced from the structure of irradiated substrates

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Języki publikacji
EN
Abstrakty
EN
Titanium atoms were alloyed into a polycrystalline alundum substrate using a various number of intense pulses consisting of plasma of the working gas and vapor and low energy ions of Ti eroded from electrodes of the rod plasma injector type generator. It appears that at a single pulse titanium always forms a thin metallic film not mixed with the substrate material. With increasing number of pulses the amount of titanium atoms mixed into the substrate increases, whereas the thickness of the film - decreases. Analyses of phase composition and of structural properties, as well as computer simulations of thermal evolution brought the present authors to the conclusion that increase of number of pulses leads to decrease of melting temperature of the top layer of the substrate. It has also been confirmed that metallic ions eroded from electrodes do not undergo such acceleration like working gas ions do; their energy remains on the 200-300 eV level. It is concluded that erosion of the electrode material occurs during the last phase of the discharge via the vacuum arc mechanism.
Słowa kluczowe
Czasopismo
Rocznik
Strony
113--117
Opis fizyczny
Bibliogr. 13 poz., rys.
Twórcy
  • Department of Materials Modification and Department of Plasma Physics and Technology, The Andrzej Sołtan Institute for Nuclear Studies, 05-400 Otwock-Świerk, Poland
  • Department of Nuclear Methods of Material Engineering, Institute of Nuclear Chemistry and Technology, 16 Dorodna Str., 03-195 Warsaw, Poland, Tel.: +48 22/ 718 06 03, Fax: +48 22/ 779 34 81
  • Department of Materials Modification and Department of Plasma Physics and Technology, The Andrzej Sołtan Institute for Nuclear Studies, 05-400 Otwock-Świerk, Poland
  • Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Rossendorf, Postfach 51 01 19, D-01314, Dresden, Germany
autor
  • Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Rossendorf, Postfach 51 01 19, D-01314, Dresden, Germany
autor
  • Department of Materials Modification and Department of Plasma Physics and Technology, The Andrzej Sołtan Institute for Nuclear Studies, 05-400 Otwock-Świerk, Poland
autor
  • Department of Materials Modification and Department of Plasma Physics and Technology, The Andrzej Sołtan Institute for Nuclear Studies, 05-400 Otwock-Świerk, Poland
Bibliografia
  • 1. Belikov AG, Goncharenko VP, Goncharenko DK, Derepowskij NT, Safronow BG, Khizhniak NA (1971) Elektricheskie kharakteristiki koaksialnogo istochnika plasmy. Zhurnal Tekchn Fisiki 41:1881–1886
  • 2. Bergman C (1988) Ion flux characteristics in arc vapour deposition of TiN. Surf Coat Tech 36:243–255
  • 3. Franghiadakis Y, Fotakis C, Tzanetakis P (1999) Energy distribution of ions produced by excimer-laser ablation of solid and molten targets. Appl Phys A 68:391–397
  • 4. Gryzinski M (1969) A new device for creating a strongly focused hot plasma jet-rod plasma injector (RPI). Nukleonika 14;7/8:679–706
  • 5. Gryzinski M, Nowikowski J, Sadowski M, Sk∏adnik-Sadowska E (1969) Research on the rod plasma injector (RPI). Nukleonika 14;9:885–892
  • 6. Gyulai J, Krafcik I (1989) Comparative status of pulsed ion implantation. Nucl Instrum Meth B37/38:275–279
  • 7. Lunney JG, Jordan R (1998) Pulsed laser ablation of metals. Appl Surf Sci 127/129:941–946
  • 8. Piekoszewski J, Langner J (1991) High intensity pulsed ion beams in material processing: equipment and applications. Nucl Instrum Meth B53:148–160
  • 9. Piekoszewski J, Grötzschel R, Wieser E, Stanis∏awski J, Werner Z, Szymczyk W, Langner J (2000) Kinetics of the pulsed erosion deposition process induced by high intensity plasma beams. Surf Coat Tech 128/129:394–399
  • 10. Pogrebnjak AD, Remnev GE, Kurokin IB, Ligachev AE (1989) Structural, physical and chemical changes induced in metals and alloys exposed to high power ion beams. Nucl Instrum Meth B36:286–304
  • 11. Popp D, Mehling A, Willzbach R, Langhoff H (1992) Surface modification by intense proton irradiation. Appl Phys A 55:561–565
  • 12. Rej DJ, Davis HA, Olson JC (1997) Materials processing with intense pulsed ion beams. J Vac Sci Technol A 15;3:1089–1097
  • 13. Witke T, Ziegele H (1997) Plasma state in pulsed arc, laser and electron deposition. Surf Coat Tech 97:414–419
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BUJ6-0006-0043
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