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Abstrakty
A monolithic, silicon, E-DeltaE telescope with a 20 žm thick DeltaE detector followed by a 300 žm thick E detector based on the n-p+-n structure was produced using a new developed process named Quasi-Selective Epitaxy (QSE). The resistivity profile of the n-p+-n structure and E-DeltaE two-dimensional contour plots obtained after irradiation of the monolithic E-DeltaE telescope by alfa-particles are presented. An energy resolution of about 1 MeV was obtained.
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Czasopismo
Rocznik
Tom
Strony
31--34
Opis fizyczny
Bibliogr. 8 poz., rys.
Twórcy
autor
- Heavy Ion Laboratory, University of Warsaw, 5A Pasteura Str., 02-093 Warsaw, Poland, Tel.: +48 22/ 55 46 210, Fax: +48 22/ 65 92 714
autor
- Institute of Electronic Materials Technology, 133 Wólczyńska Str., 01-919 Warsaw, Poland
autor
- Institute of Experimental Physics, University of Warsaw, 69 Hoża Str., 00-681 Warsaw, Poland
autor
- Institute of Electronic Materials Technology, 133 Wólczyńska Str., 01-919 Warsaw, Poland
autor
- Institute of Electronic Materials Technology, 133 Wólczyńska Str., 01-919 Warsaw, Poland
- Heavy Ion Laboratory, University of Warsaw, 5A Pasteura Str., 02-093 Warsaw, Poland, Tel.: +48 22/ 55 46 210, Fax: +48 22/ 65 92 714
Bibliografia
- 1. Classen WAP, Bloem J (1981) The nucleation CVD silicon on SiO2 Si3N4 substrates. Solid State Technol 128;6:1353−1359
- 2. Ishitani A, Kurogi Y, Tsuya H (1984) Novel device isolation technology with selective epitaxial growth. IEEE Trans Electron Dev 31;9:1283−1288
- 3. Kim C, Kikuchi K, Husimi K, Ohkawa S, Saito I (1982) Epitaxial integrated E-dE position sensitive silicon detectors. IEEE Trans Nucl Sci 29;1:779−781
- 4. Kim C, Kim H, Kikuchi K, Husimi K, Ohkawa S, Fuchi Y (1980) Epitaxial integrated E-dE silicon detectors with a buried low-resistive diffused layer. IEEE Trans Nucl Sci 27;1:258−265
- 5. Kim Y, Kim C, Husimi K, Ohkawa S, Fuchi Y, Osada S (1984) Epitaxial integrated dE1-dE2 silicon detectors. Nucl Instrum Meth 226:125−128
- 6. Kim Y, Kim C, Okhawa S et al. (1986) Self-biased silicon detectors with a built-in field for measuring heavy charged particles. IEEE Trans Nucl Sci 33;1:321−325
- 7. Knabe H, Mizushima Y, Kimura T, Kajiyama K (1976) High-speed silicon avalanche photodiodes with built-in field. J Appl Phys 47;8:3749−3751
- 8. Kordyasz AJ, Nossarzewska-Orłowska E, Sarnecki J (1996) Large area silicon detectors with built-in field. Nukleonika 41;4:23−28
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BUJ5-0004-0006