Application of neural networks for definition of parameters of uniaxial films on ellipsometric measurings

• Autorzy: Karpuk M.
• Języki publikacji: PL

Abstrakty

EN

The problem of definition of parameters of thin anisotropic films used in a microelectronics on the basis of ellipsometrical measuring is explored. The method of definition of parameters of films with use of neuron networks is offered. The networks is trained in space of acceptable values of parameters of layered system. The algorithm of tutoring of a network grounded on a rule Widrow-Hoff. At tutoring the error of experimental data's was taken into account. The neuron networks is applied for definition of parameters of uniaxial films of Langmuir-Blodgett dimethyl-3,4:9,10-perylene-bis (dicarboximide). The network has shown high performance, the results coincide with obtained other nethods. The network can be applied for examination of layered systems.

Słowa kluczowe

EN

neural network; optimization; ellipsometry; anisotropic layered

• Wydawca: Instytut Podstaw Informatyki PAN
• Czasopismo: Prace Instytutu Podstaw Informatyki Polskiej Akademii Nauk
• Rocznik: 2001
• Tom: Nr 928
• Strony: 37--41

Twórcy

autor

Karpuk M.

• Politechnika Koszalińska,