Analiza obrazów powierzchni w mikroskopii bliskich oddziaływań

• Autorzy: Jóźwiak G. , Gotszalk T.

Warianty tytułu

EN

Surface Image Analysis in Scanning Probe Microscopy

• Języki publikacji: PL

Abstrakty

PL

W pracy przedstawiono wybrane metody analizy powierzchni (ISO 25178) wskazując na rodzaj informacji, jaką można za pomocą danej metody uzyskać. Opisywane algorytmy i procedury zostały zaimplementowane w opracowanym w Wydziałowym Zakładzie Metrologii Mikro- i Nanostruktur Politechniki Wrocławskiej programie TOPOGRAF. W pracy zaprezentowano przykładowe wyniki działania zaimplementowanych algorytmów i procedur.

EN

Progress in the scanning probe microscopy makes it become a much more common tool. In the paper the principle of operation of the scanning probe microscope is presented. It is emphasized that the measurement result is an image of the investigated surface. Two groups of parameters connected with lateral properties of the tested surface image are introduced. The first group of parameters is connected with the image autocorrelation function and two dimensional Fourier transform. The texture aspect ratio and surface autocorrelation length (Fig. 1) are given as examples of the autocorrelation parameters. The second group of parameters is related to the so called 3D motif analysis. At the first stage of this analysis the image is segmented by means of the watershed segmentations algorithm. At the second stage the statistics connected with the shape and dimensions of the segments are calculated. The segmentation algorithm as well as the parameters describing shape and dimensions of segments (Fig 2) are presented in the paper. Due to the quantum nature of the micro- and nano-world, the uncertainty of products of the micro and nanotechnology will always be greater than that of products of the conventional technology. For this reason there is strong demand for flexible techniques capable of handling this increased uncertainty. The 3D motif analysis is very well suited to meet this challenge, since it enables the extension of the basic set of the parameters describing segments. Therefore the segment parameters might be adapted to the function of the investigated nanostructures. The images presented in the paper were obtained by means of the TOPOGRAF software that is developed at the Division of Micro- and Nanostructures Metrology.

Słowa kluczowe

PL

mikroskopia bliskich oddziaływań; analiza topografii powierzchni; analiza motywów 3D

EN

scanning probe microscopy; surface analysis; 3D motif analysis

• Wydawca: Wydawnictwo PAK
• Czasopismo: Pomiary Automatyka Kontrola
• Rocznik: 2010
• Tom: R. 56, nr 1
• Strony: 46--47
• Opis fizyczny: Bibliogr. 5 poz., rys.,

Twórcy

autor

Jóźwiak G.

autor

Gotszalk T.

• Wydział Elektroniki Mikrosystemów i Fotoniki Politechniki Wrocławskiej,

Bibliografia

• [1] Miles M.: Scanning probe microscopy-probing the future. „Science”, nr 277.
• [2] Blateyrone F.: 3D parameters and new filtration techniques for surface metrology. „Quality Magazine”, white papers, 15 maja 2007.
• [3] Barre F., Lopez J.: Watershed lines and catchment basins: a new 3D-motif method. „International Journal of Machine Tools and Manufacture”, nr 40.
• [4] Dietzsch M., Papenfuss K., Hartmann T.: The MOTIF-method (ISO12085) - a suitable description for functional, manufactural and metrological requirements „International Journal of Machine Tools and Manufacture”, nr 38/5-6.
• [5] Vincent L., Soille P.: Watersheds in digital spaces:an efficient algorithm based on immersion simulations . „IEEE Transactions on Pattern Analysis and Machine Intelligence”, 13/6.