A microscopic and spectroscopic investigations in CuOx-CeO2-b/Si thin films

• Autorzy: Kopia A. , Kowalski K. , Leroux Ch. , Chmielowska M.

Warianty tytułu

PL

Mikroskopowe i spektroskopowe badania cienkich warstw

• Konferencja: SOTAMA Symposium on Texture and Microstructure Analysis (2; 26-28.09.2007; Cracow, Poland)
• Języki publikacji: EN

Abstrakty

EN

Cu0,-Ce02 thin films for gas sensor application were elaborated by pulsed laser deposition technique. Targets were prepared from compacted Cu and CeO2 powder. The films were deposited on oriented Si (100) substrates with variable deposition times (t = 90, 240, 360 s) and atomic fractions of Cu (:13. = 0, 15, 21.5, 27% at.), using excimer laser system (Compex 301 λ = 248 nun from Lambda Physics Germany). The CuOx -CeO2 thin films were characterized by means of the X-ray Photoelectron Spectroscopy (XPS), Secondary Ion Mass Spectrometry (SIMS) and High Resolution Transmission Electron Microscopy (HREM). The XPS analysis has shown that Ce 4+ and Cu' ions were present at the surface of all samples. The argon ion sputtering has indicated that the surface of samples was enriched in copper. The high concentration of copper on the surface has been confirmed by SIMS.

PL

Warstwy Cu0,-CeO2 do zastosowań jako czujniki gazów, wytworzono techniką ablacji laserowej. Tarcze przygotowano z proszków Cu i CeO2 . Warstwy osadzano na podkładkach Si (001) przy różnych czasach ekspozycji t = 90, 240, 360 s i różnej zawartości Cu (0, 15, 21.5, 27% at.), z zastosowaniem lasera excimerowego Compex 301 o długości fali λ= 248 mm, firmy Lambda Physics Germany. Warstwy poddano badaniom struktury za pomocą Spektroskopii Elektronów Wzbudzonych Promieniowaniem Rentgenowskim (XPS), Spektroskopii Elektronów Wtórnych (SIMS) oraz Wysokorozdzielczej Mikroskopii Elektronowej (HREM). Analiza XPS wykazała obecność ceru na +4 stopniu utlenienia i miedzi na +1 stopniu utlenienia. Rozpylanie warstw jonami argonu wykazało iż miedź znajduje się na powierzchni warstwy. Potwierdziły to badania za pomocą SIMS. Analiza HREM wykazała iż miedź występuje w warstwach w postaci dwóch związków CuO i Cu20.

Słowa kluczowe

EN

XPS; SIMS; thin films; gas sensors; CuOx-CeO2

PL

CuOx-CeO2; XPS; SIMS; czujnik gazu

• Wydawca: Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences
• Czasopismo: Archives of Metallurgy and Materials
• Rocznik: 2008
• Tom: Vol. 53, iss. 1
• Strony: 157--160
• Opis fizyczny: Bibliogr. 12 poz., rys., tab.

Twórcy

autor

Kopia A.

autor

Kowalski K.

autor

Leroux Ch.

autor

Chmielowska M.

• FACULTY OF METALS ENGINEERING AND INDUSTRIAL COMPUTERS SCIENCE. AGH — UNIVERSITY OF SCIENCE AND TECHNOLOGY, 30-059 KRAKOW, 30 MICKIEWICZA AV., POLAND

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