The effects of humidity on the stability of LTCC pressure sensors

• Autorzy: Santo Zarnik M. , Belavic D.
• Języki publikacji: EN

Abstrakty

EN

LTCC-based pressure sensors are promising candidates for wet-wet applications in which the effect of the surrounding media on the sensor's characteristics is of key importance. The effect of humidity on the sensor's stability can be a problem, particularly in the case of capacitive sensors. A differential mode of operation can be a good solution, but manufacturing the appropriate sensing capacitors remains a major challenge. In the case of piezoresistive sensors the influence of humidity is less critical, but it still should be considered as an important parameter when designing sensors for low-pressure ranges. In this paper we discuss the stability of the sensors' offset characteristics, which was inspected closely using experimental and numerical analyses.

Słowa kluczowe

EN

thick-film piezoresistive sensors; capacitive pressure sensors; offset stability; relative humidity

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2012
• Tom: Vol. 19, nr 1
• Strony: 133--140
• Opis fizyczny: Bibliogr. 15 poz., rys., wykr.

Twórcy

autor

Santo Zarnik M.

autor

Belavic D.

• HIPOT-RR, Šentpeter 18, 8222 Otočec, Slovenia,

Bibliografia

• [1] Birol, H., Maeder, T., Nadzeyka, I., Boers, M., Ryser, P. (2007). Fabrication of a millinewton force sensor using low temperature co-fired ceramic (LTCC) technology. Sensors and Actuaors A 134, 334-8.
• [2] Partsch, U., Arndt, D., Georgi, H. (2007). A new concept for LTCC-based pressure sensors. In Proceedings of 3rd International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), Denver, USA, 2007, THA23.
• [3] Zarnik, M.S., Belavič, D., Maček, S., Holc, J. (2009). Feasibility study of a thick-film PZT resonant pressure sensor made on a prefired 3D LTCC structure. International journal of applied ceramic technology, 6(1), 9-17.
• [4] Kita, J., Moos, R. (2008). Development of LTCC-materials and their application - an overview. Information MIDEM, 38(4), 219-224.
• [5] Golonka, L.J., Roguszczak, H., Zawada, T., Radojewski, J., Roguszczak, H., Stefanow, M. (2006). LTCC microfluidic system. Int. J. Appl. Ceram. Technol., 3(2), 150-156.
• [6] Belavič, D., Zarnik, M.S., Maček, S., Jerlah, M., Hrovat, M., Pavlin, M. (2008). Capacitive pressure sensors realized with LTCC technology. In Proceedings of ISSE 2008, 271.
• [7] Belavič, D., Zarnik, M.S., Hrovat, M., Maček, S., Kosec, M. (2009). Temperature behaviour of capacitive pressure sensor fabricated with LTCC technology. Information MIDEM, 38(3), 191.
• [8] Zarnik, M.S., Belavič, D., Maček, S. (2010). Information MIDEM, 40(1), 74.
• [9] Zarnik, M.S., Belavič, D., Maček, S. (2011). Design study for a capacitive ceramic pressure sensor. Microelectronics International, 28(3), 31-35.
• [10] Marghescu, C., Ionescu, C., Svasta, P., Zarnik, M.S., Belavič, D. (2010). FE modeling of capacitive pressure sensor realized in LTCC technology. In Proceedings of ISSE 2010, Warsaw.
• [11] Ionescu, C., Svasta, P., Marghescu, C., Zarnik, M.S., Belavic, D. (2009). The design and improvement of LTCC-based capacitive pressure sensors employing finite element analysis. In Proceedings of Microelectronics and Packaging Conference, EMPC 2009.
• [12] Zarnik, M.S., Belavič, D. (2011). Experimental and numerical study of the humidity and moisture effect on the stability of an air-gap capacitor in a 3D LTCC structure. In Proceedings of EDS’11, IMAPS CS Int. Conference, Brno, Czech Republic, 62-67.
• [13] Zarnik, M.S., Belavič, D., Maček, S. (2009). Investigation of a thick-film capacitive pressure sensor in a three-dimensional LTCC structure. In Proceedings of International IMAPS-IEEE CPMT Poland Conference, 371-374.
• [14] Zarnik, M.S., Belavič, D., Maček, S. (2010). The warm-up and offset stability of a low-pressure piezoresistive ceramic pressure sensor. Sensors and actuators, A, 158(2), 198-206.
• [15] Zarnik, M.S., Belavič, D., Maček, S. (2010). Some Critical Steps in the Manufacturing of LTCC-based Pressure Sensors. In Proceedings of International Conference MIDEM 2010, 303-308.