Ultrasonic spectroscopy of silicon single crystal

• Autorzy: Sedlak P. , Tofel P. , Sedlakova V. , Majzner J. , Sikula J. , Hasse L.
• Języki publikacji: EN

Abstrakty

EN

Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by Electro-Ultrasonic Spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation. EUS is based on interaction of two signals: an electric AC signal and an ultrasonic signal, which are working on different frequencies. The ultrasonic wave affects the charge carriers' transport in the structures and the intermodulation electrical signal which is created due to the interaction between the ultrasonic wave and charge carriers, is proportional to the density of structural defects. RUS enables to measure natural frequencies of free elastic vibrations of a simply shaped specimen by scanning a selected frequency range including the appropriate resonances of the measured specimens.

Słowa kluczowe

EN

non-destructive testing; silicon single crystal; electro-ultrasonic spectroscopy; resonant ultrasonic spectroscopy

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2011
• Tom: Vol. 18, nr 4
• Strony: 621--630
• Opis fizyczny: Bibliogr. 10 poz., rys., wykr.

Twórcy

autor

Sedlak P.

autor

Tofel P.

autor

Sedlakova V.

autor

Majzner J.

autor

Sikula J.

autor

Hasse L.

• Brno University of Technology, Faculty of Electrical Engineering and Communications, Department of Physics, Technicka 10, Brno 61600, Czech Republic,

Bibliografia

• [1] Hajek, K., Sikula, J. (2007). The improved system for electro-ultrasonic nonlinear spectroscopy. In Proceeding of NDT in Progress 2007, Prague, Czech Republic, 71-79.
• [2] Migliori, A., Sarrao, J. L. (1997). Resonant Ultrasound Spectroscopy. J. Wiley & Sons.
• [3] Sedlakova, V., Sikula, J., Tofel, P., Majzner, J. (2008) Electro-ultrasonic spectroscopy of polymer based thick film layers. Microelectronics Reliability, 48(6), 886-889.
• [4] Sedlakova, V., Sikula, J., Tofel, P. (2007). Electro-ultrasonic spectroscopy of conducting solids. In Proceedings of IMAPS Poland 2007, Rzeszów-Krasiczyn, Poland, 523-525.
• [5] Hasse, L., Kiwilszo, M., Smulko, J., Stepinski, T. (2009). Quality assessment of varistor ZnO structures by resonant ultrasound spectroscopy. Insight, 51(5), 262-265.
• [6] Kim, Y. H., Han, M., Sedlakova, V., Sikula, J. (2010) Feasible study on electro-ultrasonic spectroscopy of silicon single crystal. In Proceeding of Symposium on Ultrasonic Electronics, Tokyo, Japan, 301-302.
• [7] Sikula, J., Hajek, K., Sedlakova, V.; Tofel, P., Majzner, J (2008) Improved Signal to Noise Ratio of Electro-ultrasonic Spectroscopy. ElectroScope, 2(6), 1-4.
• [8] Hajek, K., Sikula, J., Sedlak, P. (2004), Improving the practical sensitivity of nonlinear ultrasound spectroscopy for one exciting signal. In Proceeding of Defektoskopie 2004, Spindleruv Mlyn, Czech Republic, 51-58. (in Czech)
• [9] Tofel, P., Sikula, J., Sedlakova, V. (2009) NDT of single crystal CdTe and Si by electro-ultrasonic spectroscopy. In Proceeding of NDT in Progress 2009, Prague, Czech Republic, 305.
• [10] Hopcroft, M., Nix, W., Kenny, T. (2010) What is the Young's Modulus of Silicon? Journal of Micro-electromechanical Systems, 19, 229-238.