Evaluation of CMM for flatness measurements

• Autorzy: Sidki H. M. , Amer M.
• Języki publikacji: EN

Abstrakty

EN

Coordinate measuring machine (CMM) is a universal measuring instrument in dimensional metrology. However, the CMM has many sources of errors and deviations that affect its precision and accuracy. Unfortunately, the accuracy of flatness measurement by the CMM is not studied which is very important feature in metrology and industry at present time. A method is introduced to evaluate the accuracy of the flatness measurement of the Zeiss CMM based on flatness measurement of an optical flat. The flatnesses of the optical flat are measured by four different techniques using the CMM. Moreover, the effects of CMM head probe's scanning speed and step width on flatness measurements are examined separately in special measuring subroutines. The flatness of the optical flat surfaces are calibrated using Zygo phase shifting interferometer since it is used as reference for this study. The experimental results show that the CMM's probing points technique can be used for accurate measurements of flatness.

Słowa kluczowe

EN

flatness measurement; coordinate measuring machine (CMM); Zygo phase shifting interferometer

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2008
• Tom: Vol. 15, nr 4
• Strony: 585--593
• Opis fizyczny: Bibliogr. 8 poz., fot., rys., tab.

Twórcy

autor

Sidki H. M.

autor

Amer M.

• Engineering & Surface Metrology Laboratory, Length & Precision Eng. Division, National Institute for Standards, Egypt,

Bibliografia

• 1. Marsh E.: “Analysis and Performance of a Parallel Axis Flatness Measuring Instrument”. Rev. Sci. Instrum. Pub., 28 Feb. 2006.
• 2. Walker B. H.: “Walker Associates, Fringes, Waves, Optical Quality, Analysis”, Test and Measurement, The Photonics Design and Applications Handbook, 1998.
• 3. Kruger O. A.: “High-accuracy interferometric measurements of flatness and parallelism of a step gauge”. Metrologia, 38, 2001, 237-240.
• 4. International Standard ISO 10360-2, Geneva, International Organization for Standardization, 1994.
• 5. Ratajczyk E.: Technology of Coordinate Measurement. Warsaw University of Technology Press, Warsaw 2005, (in Polish).
• 6. Zeiss Calypso CMM Operating and Training Manual, Revision 4.0, April 2004. Operation manual: Zygo GPI-Xp laser interferometer, Zygo Cop. (USA).
• 7. Guide To the Expression of Uncertainty in measurement, 1995 International Organization for Standardization, ISO. 1995.
• 8. Hastings, N. A. J., Peacock, J. B.: Statistical distributions. London, Butterworth and Co., 1975.