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Nano-porous alumina humidity sensors

Identyfikatory
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
In this paper the details of porous alumina humidity sensors fabricated using anodic aluminium oxidation are presented. The main aim of this study is to establish relations between technological process parameters and electrical properties of sensors. Surface morphology was investigated by scanning electron microscopy. Impedance spectroscopy was used to identify electrical parameters of the sensor.
Rocznik
Strony
195--204
Opis fizyczny
Bibliogr. 23 poz., rys., wykr.
Twórcy
autor
autor
  • Gdansk University of Technology, Faculty of Electronics Telecommunications and Informatics, Poland, gregor@eti.pg.gda.pl
Bibliografia
  • 1. Wiederhold P. R.: Water Vapor Measurement Methods and Instrumentation, Marcel Dekker, New York, 1997.
  • 2. Kulwicki B. M.: “Humidity sensors”. J. Am. Cer. Soc, vol. 74, 1991, pp. 697-708.
  • 3. Yamazoe N., Shimizu Y.: “Humidity sensors: Principles and applications”, Sensors and Actuators, vol. 10, 1986, pp. 379-398.
  • 4. Harsányi G.: “Polymeric sensing films: new horizons in sensorics?”, Sensors and Actuators A, vol. 46, 1995, pp. 85-88.
  • 5. Chen Z., Lu C.: “umidity Sensors: A Review of Materials and Mechanisms”, Sensor Letters, vol. 3, 2005, pp. 274-295.
  • 6. Traversa E.: “Ceramic sensors for humidity detection: the state-of-the-art and future development”, Sensors and Actuators B, vol. 23, 1995, pp. 135-156.
  • 7. Seiyama T., Yamazoe N., Arai H.: “Ceramic humidity sensors”, Sensors and Actuators, vol. 4, 1983, pp. 85-96.
  • 8. Saha D., Mistry K. K., Giri R., Guha A., Sensgupta K.: “Dependence of moisture absorption property on sol-gel process of transparent nano-structured gamma - Al2O3 ceramics”. Sensors and Actuators B, vol. 109, 2005, pp. 363-366.
  • 9. Steele J. J., Gospodyn J. P., Sit J. C., Brett M. J.: Impact of morphology on high-speed humidity sensor performance, IEEE Sensors Journal, vol. 6, 2006, pp. 24-27.
  • 10. Islam T., Mistry K. K., Sengupta K., Saha H.: “Measurement of gas moisture in the PPM range using porous silicon and porous alumina sensors”, Sensors and Materials, vol. 6, 2004, pp. 345-356.
  • 11. Shingubara S.: “Fabrication of Nanomaterials Using Porous Alumina Templates”, Journal of Nanoparticle Research, vol. 5, 2003, pp. 17-30.
  • 12. Regonini D., Bowen C. R., Allsopp D., Stevens R.: “Nano-porous structures prepared by electrochemical anodisation of aluminium”, Proc. 4M 2005 -1st Int. Conf. Multi-material Micro Manufacture. Elsevier, Amsterdam, 2005, pp. 135-138.
  • 13. Khanna V. K., Nahar R. K.: “Effect of moisure on the dielectric properties of porous alumina films”, Sensors and Actuators, vol. 5, 1984, pp. 187-198.
  • 14. Nahar R. K., Khanna V. K., Khokle W. S.: “On the origin of the humidity-sensitive electrical properties of porous aluminium oxide”, Journal of Physics D, vol. 17, 1984, pp. 2097-2095.
  • 15. Nahar R. K., Khanna V. K.: “Carrier-transfer mechanisms and Al2O3 sensors for low and high humidities”, Journal of Physics D, vol. 19, 1986, pp. L141-L145.
  • 16. Chou K. S., Lee T. K., Liu F. J.: “Sensing mechanism of a porous ceramic as humidity sensor”. Sensors and Actuators B, vol. 56, 1999, pp. 106-111.
  • 17. Varghese O. K., Gong D., Paulose M., Ong K. G., Grimes C. A., Dickey E. C.: “Highly ordered nanoporous alumina films: effect of pore size and uniformity on sensing performance”, J. Mater. Res., vol. 17, 2002, pp. 1162-1171.
  • 18. Jasinski G., Chachulski B., Zajt T., Jasinski P., Nowakowski A.: “An equivalent electric circuit of a porous aluminum oxide humidity sensor”. Proc. COE 2002, Rzeszow, Poland vol. 1, 2002, pp. 417-422. (in Polish)
  • 19. Chachulski B., Jasinski G., Zajt T., Nowakowski A., Jasinski P.: “Properties of humidity sensors with porous Al2O3 as a dielectric layer”, Proc. SPIE, vol. 5505, 2004, pp. 95-100.
  • 20. Madany A., Jasinski P., Jasinski G., Chachulski B., Nowakowski A.: “Preparation and properties of nanoporius alumina-based humidity sensors”, Proc. SPIE, vol. 6348, 2006, pp. 63480C/1-8.
  • 21. Masuda H., Hasegawa F., Ono S.: “Self-Ordering of Cell Arrangement of Anodic Porous Alumina Formed in Sulfuric Acid Solution”. J. Electrochem. Soc., vol. 144, 1997, L127-L130.
  • 22. Sakai Y., Sadaoka Y., Matsuguchi M.: “Humidity sensors based on polymer thin films”, Sensors and Actuators B, vol. 35-36, 1996, pp. 85-90.
  • 23. Wang J., Wang X.-H., Wang X.-D.: “Study on dielectric properties of humidity sensing nanometer materials”, Sensors and Actuators B, vol. 108, 2005, pp. 445-449.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BSW1-0044-0006
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