Sinusoidal phase modulating interferometer for real-time surface profile measurement

• Autorzy: He G. , Jiang H. , Tan X.
• Języki publikacji: EN

Abstrakty

EN

The optical interferometry for the surface profile measurement is high accuracy, non-contact, and has a wide application in industry and scientific research. In this paper, a sinusoidal phase modulating (SPM) interferometer to realize real-time surface profile measurement is proposed, and its measuring principle is analyzed theoretically. In the SPM interferometer, the interferencje signal is detected by a high speed image sensor based on a low-speed CCD and a signal processing circuit is used to obtain the phase of each point on the surface. Therefore, the surface profile can be measured real time. The experiments measuring the surface profile of a wedge-shaped optical flat show that the measurement time of the SPM interferometer is less than 10 ms, the repetitive measurement accuracy is 5.2 nm. The experimental results confirm the validity of the SPM interferometer, and the merits of the interferometer is simple structure, high measurement accuracy.

Słowa kluczowe

EN

real-time measurement; surface profile; SPM interferometer

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2008
• Tom: Vol. 38, nr 2
• Strony: 413--420
• Opis fizyczny: Bibliogr. 22 poz.

Twórcy

autor

He G.

autor

Jiang H.

autor

Tan X.

• Chongqing University, Chongqing, China 400030

Bibliografia

• [1] TAY C.J., QUAN C., FU Y., CEN L.J., SHANG H.M., Surface profile measurement of low-frequency vibrating objects using temporal analysis of fringe pattern, Optics and Laser Technology 36(6), 2004, pp. 471–6.
• [2] SHINOZAKI R., SASAKI O., SUZUKI T., Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam, Applied Optics 43(21), 2004, pp. 4157–63.
• [3] YIN S., LI J., SONG M., Surface profile measurement using a unique microtube-based system, Optics Communications 168(1–4), 1999, pp. 1– 6.
• [4] SHENGFENG LU, YONGSHENG GAO, TIEBANG XIE, FENG XIE, JIANG X.Q., ZHU LI, FANGMIN WANG, A novel contact/non-contact hybrid measurement system for surface topography characterization, International Journal of Machine Tools and Manufacture 41(13–14), 2001, pp. 2001–9.
• [5] YOKOTA M, ASAKA A, YOSHINO T., Stabilization improvements of laser-diode closed-loop heterodyne phase-shifting interferometer for surface profile measurement, Applied Optics 42(10), 2003, pp. 1805–8.
• [6] TAY C.J., QUAN C., FU Y., HUANG Y., Instantaneous velocity displacement and contour measurement by use of shadow moiré and temporal wavelet analysis, Applied Optics 43(21), 2004, pp. 4164–71.
• [7] CHEN F., BROWN G.M., SONG M., Overview of three-dimensional shape measurement using optical methods, Optical Engineering 39(1), 2002, pp. 10–22.
• [8] BENNETT J.M., JAHANMIR J., PODLESNY J.C., BALTER T.L., HOBBS D.T., Scanning force microscope as a tool for studying optical surface, Applied Optics 34(1), 1995, pp. 213–30.
• [9] BINNING G., ROHRER H., GERBER C., WEIBEL W., Surface studies by scanning tunneling microscope, Physical Review Letters 49(1), 1982, pp. 57–61.
• [10] BINNING G., QUATE C.F., GERBER C., Atomic force microscopy, Physical Review Letters 56(9), 1986, pp. 930–3.
• [11] JIN G.F., LI J.Z., Laser Surveying, Science Publishing House, Beijing 1998, pp. 5–300.
• [12] YANG G., The Modern Optical Measurement Technology, The Jiang University Press, Hangzhou 1997, pp. 9–118.
• [13] POLSTER H.D., PASTOR J., SCOTT R., CRANE R., LANGENBECK P.H., PILSTON R., STEINBERG G., New developments in interferometry, Applied Optics 8(3), 1969, p. 521.
• [14] BRUNING J.H., HERRIOTT D.R., GALLAGHER J.E., ROSENFELD D.P., WHITE A.D., BRANGACCIO D.J., Digital wavefront measuring interferometer for testing optical surfaces and lenses, Applied Optics 13(11), 1974, pp. 2693–703.
• [15] SASAKI O., OKAZAKI H., Sinusoidal phase modulating interferometry for surface profile measurement, Applied Optics 25(18), 1986, pp. 3137–40.
• [16] LUAN Z., LIU L., LIU D, TENG S., Double shearing wavefront testing, Acta Optica Sinica 24(10), 2004, pp. 1417–20.
• [17] SASAKI O., OKAMURA T., NAKAMURA T., Sinusoidal phase modulating Fizeau interferometer, Applied Optics 29(4), 1990, pp. 512–5.
• [18] TAKAMASA SUZUKI, OSAMI SASAKI, SHUICH TAKAYAMA, TAKEO MARUYAMA, Real-time displacement measurement using synchronous detectionin a sinusoidal phase modulating interferometer, Optical Engineering 32(5), 1993, pp. 1033–7.
• [19] LI D., WANG X.Z., LIU Y.M., Fiver optic interferometer for real-time wide-range distance measurements with ANN, Acta Photonica Sinica 34(6), 2005, pp. 865–8.
• [20] WANG XUEFENG, WANG XIANGZHAO, YU DANYANG, QIAN FENG, LU HONGBIN, Photothermal modulation laser diode interferometer insensitive to external disturbances, Acta Optica Sinica 21(11), 2001, pp. 1368–71.
• [21] TAKAMASA SUZUKI, OSAMI SASAKI, JINSAKU KANEDA, TAKEO MARUYAMA, Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer, Optical Engineering 33(8), 1994, pp. 2754–9.
• [22] TAKAMASA SUZUKI, OSAMI SASAKI, TAKEO MARUYAMA, Phase locked laser diode interferometry for surface profile measurement, Applied Optics 28(20), 1989, pp. 4407–10.